User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Setup Page
70 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4.5.4 Edit or Add Wafer Sequence
NOTE
The only parameter that is entered for a Chamber or Station is the Name.
1. In the Setup page, click Wafer Sequence.
2. Continue as follows:
• To edit an existing chamber or station, click the Edit icon for the
chamber or station.
• To add a new chamber, click + New Chambers.
• To add a new location, click + New Location.
3. Type the Name for the chamber or location.
IMPORTANT
Use an informative name that includes information that will be important for
operators to know about the chamber or station.