User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI User Mission page
9022549-000/AH KLA - Confidential - Restricted Distribution 75
3. Click on Reports to FA Host.
4. Click on Execute to run the OHT mission.
4.6.3 To Execute ToolOHT Mission
1. Click on Tool in User Mission.
2. Use drop-down and select ToolID.
3. Use drop-down and select Basline Tool ID (optional).
4. Use drop-down and select Tool Recipe.
5. Use drop-down and select Carrier ID.