User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI History Page
78 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4.7 History Page
The History page displays information about missions that have run.
1. To view the History page, click History.
NOTE
• shows that the mission ran successfully
• shows that the mission did not run successfully
4.8 Administration Page
The Administration page allows those with Administrator-level privileges to
remote-connect to KLA Automation Stations to perform troubleshooting.
IMPORTANT
The Administration page is available only to those who log in with the role of
Administrator.
1. To view the Administration page, click Administration.