User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Administration Page
80 KLA - Confidential - Restricted Distribution KLA Automation User Guide
4.8.3 FOUPS
IMPORTANT
This will allow User to view the configured FOUPs list in the server.
1. Click on "FOUPS" to view the list of FOUPs configured in the server.
2. The newly added FOUP Status will be "Disabled" by default.
3. User has to enable the Status to "Enabled" with the edit option.
4.8.4 Data Maintenance
IMPORTANT
This feature allow the User to clean up the AM Data in Drive and Database.
1. Click on "Data Maintenance" to view the space existing in the Drive and
Database.
2. From the above figure User must identify the sections "Available space"
and “Cleanup” in the UI.