User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Administration Page
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3. User must see the available space in Drive and Database in “Available
space”.
4. Also User must be notified when clean up is required to AM Data in Drive
and Database (Refer to below Figure).
5. To cleanup the AM Data in Drive and Database, User must select required
option in the Cleanup option drop down box (Refer to below Figure).
6. Then enter the password in the “Enter Password” section (Refer to below
Figure).