User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Analysis
9022549-000/AH KLA - Confidential - Restricted Distribution 83
4.9 Analysis
IMPORTANT
This Analysis page will allow User to create Baseline, allow User to see the
monitoring mission results and User must view whether the tool has qualified
or not.
•Click on “Analysis” and the page will be displayed as shown below.
4.9.1 Baseline
IMPORTANT
This section will allow user to create the Baseline per tool id and load port
number.
1. Click on “Baseline” and the page will be displayed as shown below.
2. User can create the Baseline for particular Tool Id and Load Port.
3. Click on “Load” to get the mission raw data of particular event selected in
the mission data.