User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
1. Introduction KLA Automation System Overview
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1.
Introduction
1.1 KLA Automation System Overview
The KLA Automation System provided by KLA automates the use of
instrumented wafers in a semiconductor wafer fab. The KLA Automation
System is used with SensArray temperature wafers and Automation Metrology
motion analysis wafers to enable real-time measurement and monitoring of
parameters that are critical to fab yield and productivity.
The KLA Automation hardware consists of the following components:
• Battery-powered, instrumented wafers that perform the actual
measurements and reside in Automation FOUPs; examples are SensArray
Temperature Wafers and Automation Metrology Wafers (to measure motion
and humidity)
• Battery-powered Automation FOUPs to transport and store instrumented
wafers, and to provide wafer charging and data communications (see
Section 2.2 for information about KLA Automation FOUPs)
• KLA Automation Stations that charge Automation FOUPs and provide the
communication between the FOUP and the fab host (see Section 2.1 for
information about KLA Automation Stations)
• KLA Automation Controller to control the system