User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Analysis
92 KLA - Confidential - Restricted Distribution KLA Automation User Guide
20.After the successful creation of the Baseline the pop up will be shown as
mentioned below.
NOTE
A pop up will be shown in case of the Baseline already exists, Here User
has to decide whether to override or cancel the Baseline creation.
21. The Baseline existence will become “true” in “Results“ page after
successful creation of Baseline to the particular Tool Id and Load Port
combination. Also the Baseline existence will become “true” for other
events of same combination of Tool Id and Load Port Number.
4.9.2 Results
IMPORTANT
This page will allow User to see the Monitoring Mission details of per tool id and
load port number.
• Baseline must be existed for monitoring mission results.
• Baseline will be created (in the section Baseline) in case of non existence of
baseline and re-run the mission to get the monitoring mission details.
1. Click on “Results” to view the raw data of particular Tool, Recipe and
Loadport combination.