User's Guide
Table Of Contents
- Table of Contents
- Preface
- Introduction
- 1.1 KLA Automation System Overview
- 1.2 KLA Automation System Operation
- 1.3 KLA Automation Missions
- 1.4 Regulatory Compliance Statements
- 1.4.1 Prohibitions on Modifications
- 1.4.2 Class A Digital Device
- 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable
- 1.4.4 Singapore Regulatory Statement
- 1.4.5 Israel Regulatory Statement
- 1.4.6 Input Power for Battery Charging
- 1.4.7 Environmental conditions for the equipment
- 1.4.8 Critical component list
- KLA Automation System Hardware Components
- KLA AM Station Application UI
- KLA Automation Web UI
- Glossary
- Revision History
4. KLA Automation Web UI Analysis
9022549-000/AH KLA - Confidential - Restricted Distribution 95
4.9.3 BaselineView
IMPORTANT
This section will allow user to view the Baselines existed (Base line created in
Baseline section) per tool type and also allow the User to view their Mission
Data.
1. Click on "BaselineView" and the page will be displayed as shown below.
2. Select Tool Type to load the mission data.
3. Click on “Load” to select to get the mission raw data of particular event
selected in the mission data.
4. User can delete the Baseline for particular Tool Type (See the above
figure).
5. Refer to the step 12 to see the details of Errors List.