User Manual

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TABLE OF CONTENTS
Subject Page
Introduction ................................................................................................................................................................ 3
Inspection ................................................................................................................................................................... 3
Installation .................................................................................................................................................................. 3
Operation .................................................................................................................................................................... 4
Typical Installations ................................................................................................................................................... 4
Calibration Curve/Table ............................................................................................................................................. 5
Actual Standard and Mass Flow Equations ........................................................................................................... 5-7
Reading your Laminar Flow Element Curve/Table .................................................................................................... 9
Correction Factor Tables/Curves
Air Humidity for Density ...................................................................................................................................... 8
Air Humidity for Viscosity .................................................................................................................................... 8
Pressure ............................................................................................................................................................... 12
Air Viscosity ........................................................................................................................................................ 13
Air Temperature/Viscosity .................................................................................................................................. 14
Temperature ......................................................................................................................................................... 15
Maintenance ............................................................................................................................................................ 14
Troubleshooting ....................................................................................................................................................... 15
LFE Dimensions ..................................................................................................................................................... 17