User Guide

7 - 8
No. 99MBC034B
5) Measurement range: Can be specified/modified by inputting
SET1 through SET3 (For more information, refer to section
7.7.5 Designating CELs to be output/Specifying the
calculation method.)
List of measurement ranges: If the peak mode is set to cur-
rent value, MAX, or MIN.
SET SET SET Measurement range (mm)/ Resolution (mm)
123 10µm gage 5µm gage 1µm gage 0.5µm gage
000 0±0.1 0±0.05 0±0.01 0±0.005
/0.01 /0.005 /0.001 /0.0005
001 0±0.2 0±0.1 0±0.02 0±0.01
/0.02 /0.01 /0.002 /0.001
010 0±0.5 0±0.25 0±0.05 0±0.025
/0.05 /0.025 /0.005 /0.0025
011 0±10±0.5 0±0.1 0±0.05
/0.1 /0.05 /0.01 /0.005
100 0±20±10±0.2 0±0.1
/0.2 /0.1 /0.02 /0.01
101 0±50±2.5 0±0.5 0±0.25
/0.5 /0.25 /0.05 /0.025
110 0±10/1 0±5/0.5 0±1/0.1 0±0.5/0.05
111 0±20/2 0±10/1 0±2/0.2 0±1/0.1
List of measurement ranges: If the peak mode is set to TIR.
SET SET SET Measurement range (mm)/ Resolution (mm)
123 10µm gage 5µm gage 1µm gage 0.5µm gage
000 0-0.2 0-0.1 0-0.02 0-0.01
/0.01 /0.005 /0.001 /0.0005
001 0-0.4 0-0.2 0-0.04 0-0.02
/0.02 /0.01 /0.002 /0.001
010 0-1.0 0-0.5 0-0.1 0-0.05
/0.05 /0.025 /0.005 /0.0025
011 0-2 0-1 0-0.2 0±0.1
/0.1 /0.05 /0.01 /0.005
100 0-4 0-2 0-0.4 0-0.2
/0.2 /0.1 /0.02 /0.01
101 0-10 0-5 0-1 0-0.5
/0.5 /0.25 /0.05 /0.025
110 0-20/1 0-10/0.5 0.1(0)-2/0.1 0-1/0.05
111 0-40/2 0-20/1 0-4/0.2 0-2/0.1
Each resolution (range of one segment) is a value derived
from the measurement range evenly divided by twenty.
Example: If the measurement range = 0.1mm, the resolution
= 0.01mm.