Owner's manual

Table B-1 Collection Events (Continued)
B-4 Appendix B - Collection Events
Collection Event Name CEID
Related
Data Variables
Description
ConveyorCodeDownloaded1 3008 None
Collection event when a new conveyor control code (atom) has been
downloaded into the Conveyor 1 controller.
NewFluidFileLoaded2 3009 SV303
Collection event when a new fluid parameter file for Valve 2 is loaded by
an operator.
FluidParametersModified2 3010 SV 303
Collection event when the fluid parameters for Valve 2 have been
changed by an operator.
FluidParametersSaved2 3011 SV 303
Collection event when the fluid parameters for Valve 2 have been saved
onto the local mass storage.
ConveyorCodeDownloaded2 3012 None
Collection event when a new conveyor control code (atom) has been
downloaded into the Conveyor 2 controller.
ce_NewOperatorIDNeedsValidation 3630 630 Collection event after operator ID is entered.
ce_WaferLotNumberNeedsValidation 3631 552, 631 Collection event when verifying wafer lot number entered by operator.
ce_WaferCountUpdated 3632 550 Collection event when wafer count is updated.
ce_WaferScribeNeedsValidation 3633 552
Collection event when verifying each wafer scribe number sent from
loader.
ce_WaferStart 3634 552, 631 Collection event when wafer processing is started.
ce_WaferComplete 3635 None Collection event when wafer processing is complete.
ce_WaferLotComplete 3636 None Collection event when wafer lot is complete.
ce_StartRecipeSelection 3637 None Collection event to signal host that recipe download/selection may start.
ce_ConfigParmChangedString 3638 450, 451, 453 Collection event when a string configuration parameter is changed.
ce_ConfigParmChangedInt 3639 450, 452, 454 Collection event when an integer configuration parameter is changed.
ce_ConfigParmRejected 3650 5999
Collection event when a bad configuration parameter has been
downloaded from the host
ce_FluidParmChangedString 3651
450, 451, 453, 455, 456,
457
Collection event when a string fluid file parameter is changed.
ce_FluidParmChangedInt 3652
450, 452, 454, 455, 456,
457
Collection event when a fluid file integer parameter is changed.