Owner's manual

Appendix F - Variables Grouped by Fluidmove Activity F-5
F.3 Lot Level Variables
Table F.3-1 Lot Level Variables
Variable Name
Data
Type
ID
SECS
Type
Related CEID Description
FlowRate1 DV 400 F8 4012 Flow rate for Valve 1
ScaleMeasurement1 DV 406 F8 4010 Scale measurement for Valve 1
DWVMEASUREDAVG DV 416 F8 4020 Average measured weight of all dispenses
during the dispense weight verification
procedure.
RefillRate1 DV 418 A[100] 3001 DP refill rate for Valve 1
SPHTR1CHAN1-SPHTR1CHAN17 SV 1101 to 1117 F8 3003 Set Points for Heater 1 channels 1 to 17.
SPHTR2CHAN1-SPHTR2CHAN17 SV 1118 to 1134 F8 3003 Set Points for Heater 2 channels 1 to 17.
SPHTR3CHAN1-SPHTR3CHAN17 SV 1135 to 1151 F8 3003 Set Points for Heater 3 channels 1 to 17.
SPHTR4CHAN1-SPHTR4CHAN17 SV 1152 to 1168 F8 3003 Set Points for Heater 4 channels 1 to 17.
OFFSETHTR1CHAN1-OFFSETHTR1CHAN17 SV 1201 to 1217 F8 3003 Offsets for Heater 1 channels 1 to 17.
OFFSETHTR2CHAN1-OFFSETHTR2CHAN17 SV 1218 to 1234 F8 3003 Offsets for Heater 2 channels 1 to 17.
OFFSETHTR3CHAN1-OFFSETHTR3CHAN17 SV 1235 to 1251 F8 3003 Offsets for Heater 3 channels 1 to 17.
OFFSETHTR4CHAN1-OFFSETHTR4CHAN17 SV 1252 to 1268 F8 3003 Offsets for Heater 4 channels 1 to 17.
Table F.3-2 Lot Level Variables – Related Collection Events
Collection Event Name CEID
Related Data
Variables
Description
ce_HeaterTempsUpdated 5014 801-851 Collection event triggered when heater temperatures are updated.