Datasheet

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MPX5500

Rev 7, 09/2009

Freescale Semiconductor

Pressure

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated and

Calibrated

The MPX5500 series piezoresistive transducer is a state-of-the-art

monolithic silicon pressure sensor designed for a wide range of applications,

but particularly those employing a microcontroller or microprocessor with A/D

inputs. This patented, single element transducer combines advanced

micromachining techniques, thin-film metallization, and bipolar processing to

provide an accurate, high level analog output signal that is proportional to the

applied pressure.

Features

• 2.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Durable Epoxy Unibody Element

• Available in Differential and Gauge Configurations

ORDERING INFORMATION

Device Name

Case

No.

# of Ports Pressure Type

Device

Marking

None Single Dual Gauge Differential Absolute

Unibody Package (MPX5500 Series)

MPX5500D

867 • • MPX5500D

MPX5500DP

867C • • MPX5500DP

MPX5500

Series

0 to 500 kPa (0 to 72.5 psi)

0.2 to 4.7 V Output

MPX5500D

CASE 867-08

MPX5500DP

CASE 867C-05

UNIBODY PACKAGES

Summary of content (7 pages)

PAGE 1
Pressure Freescale Semiconductor + MPX5500 Rev 7, 09/2009 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated MPX5500 Series 0 to 500 kPa (0 to 72.5 psi) 0.2 to 4.7 V Output The MPX5500 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs.
PAGE 2
Pressure Operating Characteristics Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4. required to meet electrical specifications.) Characteristic Symbol Min Typ Max Unit POP 0 — 500 kPa VS 4.75 5.0 5.25 Vdc IO — 7.0 10 mAdc (0 to 85°C) Voff 0.088 0.20 0.313 Vdc (0 to 85°C) VFSO 4.587 4.70 4.813 Vdc (0 to 85°C) VFSS — 4.50 — Vdc (0 to 85°C) — — — ±2.5 %VFSS V/P — 9.
PAGE 3
Pressure Maximum Ratings Table 2. Maximum Ratings(1) Rating (2) Symbol (P2 ≤ 1 Atmosphere) Value Unit P1max 2000 kPa Storage Temperature Tstg -40 to +125 °C Operating Temperature TA -40 to +125 °C Maximum Pressure 1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
PAGE 4
Pressure On-chip Temperature Compensation and Calibration Figure 3 illustrates the Differential/Gauge basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For use of the MPX5500D in a high pressure, cyclic application, consult the factory.
PAGE 5
Pressure PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from harsh media. The Freescale MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table.
PAGE 6
Pressure PACKAGE DIMENSIONS C NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). R POSITIVE PRESSURE (P1) M B -AN PIN 1 SEATING PLANE 1 2 3 4 5 DIM A B C D F G J L M N R S L 6 -TG J S F D 6 PL 0.136 (0.005) STYLE 1: PIN 1. 2. 3. 4. 5. 6. STYLE 2: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX M T A M STYLE 3: PIN 1. 2. 3. 4. 5. 6.
PAGE 7
How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 +1-800-521-6274 or +1-480-768-2130 www.freescale.