Datasheet

ManualsBrandsNXP SEMICONDUCTORS ManualsSensorsPressure sensor 20 kPa up to 400 kPa SMD

MPXH6400A

Rev 4, 11/2009

Freescale Semiconductor

Pressure

High Temperature Accuracy

Integrated Silicon Pressure Sensor

for Measuring Absolute Pressure,

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The Freescale MPXxx6400A series sensor integrates on-chip, bipolar op amp

circuitry and thin film resistor networks to provide a high output signal and

temperature compensation. The small form factor and high reliability of on-chip

integration make the Freescale pressure sensor a logical and economical choice

for the system designer.

The MPXxx6400A series piezoresistive transducer is a state-of-the-art,

monolithic, signal conditioned, silicon pressure sensor. This sensor combines

advanced micromachining techniques, thin film metallization, and bipolar

semiconductor processing to provide an accurate, high level analog output signal

that is proportional to applied pressure.

Features

• Improved Accuracy at High Temperature

• Available in Small and Super Small Outline Packages

• 1.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Temperature Compensated from -40° to +125°C

• Durable Thermoplastic (PPS) Surface Mount Package

ORDERING INFORMATION

Device Name

Package

Options

Case

No.

# of Ports Pressure Type

Device

Marking

None Single Dual Gauge Differential Absolute

Small Outline Package (MPXA6400A Series)

MPXA6400AP Tray 1369

• •

MPXA6400A

Super Small Outline Package (MPXH6400A Series)

MPXH6400AC6U Rails 1317A

• •

MPXH6400A

MPXH6400AC6T1 Tape and Reel 1317A

• •

MPXH6400A

Super Small Outline Package (Media Resistant Gel) (MPXHZ6400A Series)

MPXHZ6400AC6T1 Tape and Reel 1317A

• •

MPXHZ6400A

MPXA6400A

20 to 400 kPa (3.0 to 58 psi)

0.2 to 4.8 V Output

MPXH6400A

MPXHZ6400A

Series

SUPER SMALL OUTLINE PACKAGE

MPXH6400AC6U/C6T1

MPXHZ6400AC6T1

CASE 1317A-04

MPXA6400AP

CASE 1369-01

SMALL OUTLINE PACKAGE

Application Examples

• Industrial Controls

• Engine Control/Manifold Absolute

Pressure (MAP)/Liquefied Petroleum

Gas (LPG)

Summary of content (11 pages)

PAGE 1
Pressure Freescale Semiconductor MPXH6400A Rev 4, 11/2009 High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated MPXA6400A MPXH6400A MPXHZ6400A Series 20 to 400 kPa (3.0 to 58 psi) 0.2 to 4.8 V Output The Freescale MPXxx6400A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation.
PAGE 2
Pressure OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2) Characteristic Symbol Min Typ Max Unit Pressure Range POP 20 — 400 kPa Supply Voltage(1) VS 4.64 5.0 5.36 Vdc Supply Current Io — 6.0 10 mAdc Minimum Pressure Offset @ VS = 5.0 Volts(2) (0 to 85°C) Voff 0.133 0.2 0.267 Vdc Full Scale Output @ VS = 5.0 Volts(3) (0 to 85°C) VFSO 4.733 4.8 4.866 Vdc Full Scale Span @ VS = 5.0 Volts(4) (0 to 85°C) VFSS 4.467 4.6 4.
PAGE 3
Pressure MAXIMUM RATINGS(1) Rating Symbol Value Unit Maximum Pressure (P1 > P2) PMAX 1600 kPa Storage Temperature TSTG -40° to +125° °C Operating Temperature TA -40° to +125° °C Output Source Current @ Full Scale Output(2) Io + 0.5 mAdc Output Sink Current @ Minimum Pressure Offset(2) Io - -0.5 mAdc 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2.
PAGE 4
Pressure Figure 1 illustrates the absolute sensing chip in the basic Super Small Outline chip carrier (Case 1317). Figure 2. illustrates a typical application circuit (output source current operation). Figure 3. shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over 0 to 85°C temperature range. The output will saturate outside of the rated pressure range.
PAGE 5
Pressure Transfer Function (MPXxx6400A) Normal Transfer Value: VOUT = VS x (0.002421 x P – 0.00842) ± Pressure Error x Temp. Factor x 0.002421 x VS VS = 5.0 ± 0.36 VDC Temperature Error Band MPXxx6400A Series 4.0 3.0 Temperature Error Factor Break Points 2.0 1.0 Temp 0.0 -40 -20 0 20 80 40 60 Temperature in C° 100 120 140 NOTE: The Temperature Multiplier is a linear response from 0°C to -40°C and from 85°C to 125°C - 40 0 to 85 125 Multiplier 3 1 1.
PAGE 6
Pressure PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE The two sides of the pressure sensor are designated as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel, which protects the die from harsh media. The MPX pressure Part Number sensor is designed to operate with positive differential pressure applied, P1 > P2.
PAGE 7
Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE MPXH6400A Sensors Freescale Semiconductor 7
PAGE 8
Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE MPXH6400A 8 Sensors Freescale Semiconductor
PAGE 9
Pressure PACKAGE DIMENSIONS PAGE 1 OF 2 CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE MPXH6400A Sensors Freescale Semiconductor 9
PAGE 10
Pressure PACKAGE DIMENSIONS PAGE 2 OF 2 CASE 1369-01 ISSUE B SMALL OUTLINE PACKAGE MPXH6400A 10 Sensors Freescale Semiconductor
PAGE 11
How to Reach Us: Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.