SECTION 2 Installation and Connections/Wiring SECTION 3 Preparing for Communications SECTION 4 Reading from/Writing to ID Tags SECTION 5 Troubleshooting SECTION 6 Appendix CIDRW System V640-HAM11 V640-HS61 V700-L22 V700-L11 Amplifier Unit CIDRW Head CIDRW Controller Link Unit User's Manual SECTION ëÊ 1 èÕ1 SECTION ëÊ 2 èÕ2 SECTION ëÊ 3 èÕ3 SECTION ëÊ 4 èÕ4 SECTION 5 SECTION 6 SECTION 1 Product Outline INTRODUCTION ÇÕǹÇ?Ç Introduction Table of Contents/Precautions on Safety
INTRODUCTION INTRODUCTION Warranty, Limitations of Liability, Application Considerations Disclaimers Read and Understand this Manual Warranty, Limitations of Liability, Application Considerations Disclaimers Please read and understand this manual before storing, installing, programming, operating, maintaining, or disposing of the products. Please consult your OMRON representative if you have any questions or comments.
INTRODUCTION At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use. The following are some examples of applications for which particular attention must be given.
INTRODUCTION INTRODUCTION Warranty, Limitations of Liability, Application Considerations Disclaimers PERFORMANCE DATA Warranty, Limitations of Liability, Application Considerations Disclaimers Performance data given in this manual is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application requirements.
INTRODUCTION INTRODUCTION Applicable Standards Precautions for Safe Use 1. FCC Rules (Federal Communications Commission) This device complies with Part 15 Subpart C of the FCC Rules. FCC ID: Ｅ4E6CYCIDV6400304 E4E6CYCID6400202 Operation is subject to the following two conditions: (1) this device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation.
INTRODUCTION INTRODUCTION Applicable SEMI Standards This CIDRW system complies with the following standards. Precautions for Safe Use • SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD • SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II) • SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I) SEMI is the acronym for Semiconductor Equipment and Materials International. SECS is the acronym for SEMI Equipment Communications Standard.
INTRODUCTION INTRODUCTION Precautions for Safe Use 8 Precautions for Safe Use Please observe the following precautions for safe use of the products. • Do not insert water or wires through gaps in the case. This could cause fire or electric shock. • In the event of a malfunction, stop using the product immediately, turn off the power, and consult your OMRON dealer. • Dispose of this product as industrial waste.
INTRODUCTION INTRODUCTION Precautions for Correct Use Precautions for Safe Use Please observe the following precautions to prevent failure to operate, malfunctions, or undesirable effects on product performance. Installation Site Install the product at a location where: • It is not exposed to direct sunlight. • It is not exposed to corrosive gases, dust, metal chips, or salt. • The working temperature is within the range stipulated in the specifications.
INTRODUCTION INTRODUCTION Power and Ground Cables • Use the power supply voltage specified in this manual. • Ensure correct polarity when connecting to the +/- power supply terminals. Precautions for Safe Use • The ground terminals must be connected to a ground with a grounding resistance not exceeding 100 ohms. Wiring Work • Always turn the power off before starting wiring work or connecting/disconnecting cables. • Do not run high-voltage lines and power lines though the same conduit.
INTRODUCTION INTRODUCTION Editor’s Note Precautions for Safe Use Visual Aids Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and performance. Read this information carefully and follow the cautions: if the product is used incorrectly, data or the equipment itself could be destroyed. Indicates summaries of points of particular importance relating to product performance, e.g.
INTRODUCTION Table of Contents INTRODUCTION Table of Contents Table of Contens Introduction Read and Understand this Manual 2 WARRANTY 2 LIMITATIONS OF LIABILITY 2 SUITABILITY FOR USE 3 PROGRAMMABLE PRODUCTS 3 PERFORMANCE DATA 4 CHANGE IN SPECIFICATIONS 4 DIMENSIONS AND WEIGHTS 4 ERRORS AND OMISSIONS 4 Applicable Standards 5 Applicable SEMI Standards 7 Precautions for Safe Use 8 Precautions for Correct Use 9 Editor’s Note 11 Table of Contents 12 SECTION 1 Product Outline 15
INTRODUCTION Table of Contents 69 70 When SECS is Not Used 81 SECTION 5 Troubleshooting 91 When SECS is Used 92 When SECS is Not Used 98 SECTION 6 Appendix Table of Contents When SECS is Used INTRODUCTION SECTION 4 Reading from/Writing to ID Tags 103 Specifications and Dimensions 104 System Configuration Examples 108 Characteristic Data depending on Conditions of Use 110 Data Segment Area 122 Regular Inspection 123 SECS Protocol Specifications 124 ASCII Code Table 129 Protectiv
INTRODUCTION Table of Contents INTRODUCTION MEMO Table of Contens 14 CIDRW System User’s Manual
SECTION 1 Product Outline SECTION 1 Product Outline What is a CIDRW System? 16 Features 17 System Configuration 18 Component Names and Functions 19 Flowchart for Getting Started 23 CIDRW System User’s Manual 15
SECTION 1 Product Outline What is a CIDRW System? The CIDRW system writes data to, and reads data from, the carrier IDs (ID Tags) mounted on the carriers SECTION 1 What is a CIDRW System? (FOUP) in semiconductor manufacturing processes without contacting these ID Tags. abbreviation of "Carrier ID Reader/Writer" and this abbreviation is used throughout this manual.
SECTION 1 Product Outline Features SECTION 1 Features CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4) CIDRW System Conforming to SEMI Standards CIDRW Controller V700-L22 Host Amplifier Unit CIDRW Head V640-HAM11 V640-HS61 ID Tag RI-TRP-DR2B (Made by Texas Instruments) SECS I/II RS-232C RS-232C List of Applicable Standards • SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD • SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II) • SEMI E4 EQUIPMENT COMMUNIC
SECTION 1 Product Outline System Configuration SECTION 1 System Configuration When SECS is Used Communication with the host device is possible using the SECS protocol. CIDRW Controller V700-L22 Host RS-232C SECS I/II This is e.g. a host, or equipment controller. Amplifier Unit CIDRW Head V640-HAM11 V640-HS61 RS-232C Multiple Amplifier Units are controlled in response to commands (SECS) from the host device. These are units that control a CIDRW Head.
SECTION 1 Product Outline Component Names and Functions SECTION 1 Component Names and Functions CIDRW Controller V700-L22 5'%5 No. 45 % +& /#+06'0#00%' Name Function 1 Power indicator (green) 2 OPERATING indicator (green) Lit while the CIDRW system status model is operating. An LED that indicates whether the power is ON or OFF. Lit while the power is ON. 3 ALARMS indicator (green) 4 BUSY indicator (green) Lit when the status of "OparationalStatus" of the CIDRW system is "BUSY.
SECTION 1 Product Outline Amplifier Unit V640-HAM11 SECTION 1 Component Names and Functions 20 No. Name Function 1 Dedicated power supply connector Connect to the 24 VDC power supply. 2 RS-485 port When using multiple CIDRW Heads, connect this to the RS-485 port of another Amplifier Unit or to the multi-connection port of a Link Unit. 3 RS-232C port Connected to a CIDRW Controller or a host device. Uses the OMRON proprietary communications protocol.
SECTION 1 Product Outline CIDRW Head V640-HS61 SECTION 1 Component Names and Functions V640-HS61 CIDRW HEAD No. Name Function 1 Antenna Used to communicate with ID Tags. 2 Antenna center This is the center of the communications area. 3 Connector Connect to an Amplifier Unit.
SECTION 1 Product Outline Link unit V700-L11 SECTION 1 Component Names and Functions No. 22 Name Function 1 Multi-connection port (RS-485) 2 RUN indicator (green) Turns ON while the Link Unit is in normal operation. 3 ID indicator (green) Turns ON during data communications with a V700 series IDRW Head. 4 COMM indicator (green) Turns ON during data communications with the host device.
SECTION 1 Product Outline Preparation for Communications SECTION 1 Flowchart for Getting Started Installation and Connections Flowchart for Getting Started Installation Refer to page 26. Connection and Wiring Refer to page 31. Set the Communications Conditions for the CIDRW Controller Refer to page 48. Set the Communications Conditions for Amplifier Units Refer to page 61. Set the Communications Conditions for Link Units Trial Operation Refer to page 63.
SECTION 1 Product Outline Communications SECTION 1 Flowchart for Getting Started When SECS is Used Refer to page 70. When SECS is Not Used Refer to page 81. When you Encounter a Problem... When SECS is Used Refer to page 92. List of Error Messages Refer to page 92. Controller Indicators Refer to page 93. Operation Check Flowchart When SECS is Not Used 24 CIDRW System User’s Manual Refer to page 98. List of Error Messages Refer to page 98. Amplifier Unit Indicators Refer to page 99.
SECTION 2 Installation and Connections/Wiring 26 Connections and Wiring 31 CIDRW System User’s Maual SECTION 2 Installation and Connections/Wiring Installation 25
SECTION 2 Installation and Connections/Wiring Installation CIDRW Controller There is a switch for selecting the operation mode (Normal Operation mode <-> Setting mode) on the bottom face of the CIDRW Controller. Set the communications conditions in the Setting mode (switch position 3) before mounting the SECTION 2 Installation CIDRW Controller. Refer to page 48. Set the Controller to the Normal Operation mode (switch position 0) when mounting it.
SECTION 2 Installation and Connections/Wiring Amplifier Unit Use spring washers and flat washers with the four M4 screws when mounting the Amplifier Unit. SECTION 2 Installation Mounting dimensions (Unit: mm) r r / RUN COMM NORM ERROR Tighten the M4 screws with a torque not exceeding 1.2 N·m.
SECTION 2 Installation and Connections/Wiring CIDRW Head The area for communications with ID Tags varies substantially according to the installation orientations and the background conditions (metals, noise, etc.). Check the communications area before deciding the installation position. For details on actual communications distances, see Characteristic Data depending on Conditions of SECTION 2 Installation Use in Appendix. Refer to page 109.
SECTION 2 Installation and Connections/Wiring Influence of Background Metal on ID Tag Metals in the vicinity of the communications area will affect the range, making it smaller. Refer to page 115. Influence of Noise SECTION 2 Installation This CIDRW system uses a frequency of 134 kHz for communications with ID Tags. Equipment such as switching power supplies, inverters, servomotors, or monitors in the surrounding area will adversely affect communications, restricting the communications area.
SECTION 2 Installation and Connections/Wiring Link Unit Mount Link Units with the two M4 screws and washers provided as accessories. SECTION 2 Installation Mounting dimensions (Unit: mm) Two M4 or 4.2-dia. holes • Tighten the M4 screws with a torque not exceeding 1.2 N·m. • Do not apply organic solvents used with screw locking agents at the locations where the screws are inserted.
SECTION 2 Installation and Connections/Wiring Connections and Wiring CIDRW Controller Power Supply and Grounding Wires 24 VDC SECTION 2 Connections and Wiring Connect the wires to the 24 VDC power supply terminals and frame ground terminal. Ground to 100 Ω or less. • Crimp terminals The terminal screws on the terminal block are M3 size. Use appropriate crimp terminals for M3 screws as shown below. Crimp terminals Shape Size Forked 6 mm max. Round 6 mm max.
SECTION 2 Installation and Connections/Wiring SECS port The method for wiring for communications with a host device via the SECS port is explained here. Host CIDRW Controller SECTION 2 Connections and Wiring To the RS-232 port To the SECS port • Connector The SECS port on the Controller is a D-SUB 9-pin connector. The pin arrangement is shown below.
SECTION 2 Installation and Connections/Wiring • Wiring The cable length should be no greater than 15 m. PC/AT Computer D-SUB, 9-pin Socket type #4-40 Name Pin No. Pin No. Name NC 1 1 NC RD 2 2 RD SD 3 3 SD NC 4 4 NC SG 5 5 SG NC 6 6 NC RS 7 7 RS NC 8 8 CS NC 9 9 NC SECTION 2 Connections and Wiring CIDRW Controller V700-L22 D-SUB, 9-pin Socket type #4-40 Ground shielded wires either at the CIDRW Controller side or at the PC/AT side.
SECTION 2 Installation and Connections/Wiring Amplifier Unit Connector for connecting a CIDRW Head 1. Align the pin on the connector with the channel in the cable connector and insert SECTION 2 Connections and Wiring the cable connector. Hold the fixed part of the connector while making this insertion. 2. After inserting the connector fully home, turn the fixed part clockwise to lock it.
SECTION 2 Installation and Connections/Wiring • Dedicated power supply connector and RS-485 port connector Prepare a V640-A90 (can be purchased as an accessory). Contents of the V640-A90 set (accessory) Name When procured individually Quantity One Pins for power supply connector Three Connector for RS-485 port One Manufacturer Tyco Electronics Model 1-178288-3 SECTION 2 Connections and Wiring Power supply connector 175217-3 Phoenix Contact MSTB2.5/2-STF-5.
SECTION 2 Installation and Connections/Wiring RS-232C Port The method for connecting a CIDRW Controller or host device via the RS-232C port is explained here. CIDRW Controller Amplifier Unit SECTION 2 Connections and Wiring To the RS-232C port To ID port Host Amplifier Unit To the RS-232C port To the RS-232C port • Connector The RS-232C port of the Amplifier Unit is a D-SUB, 9-pin connector. The pin arrangement is shown below.
SECTION 2 Installation and Connections/Wiring Recommended model Manufacturer Cable Model Hitachi Cable Connector Host side OMRON XM2D-0901 Hood XM2S-0913 Socket XM2D-0901 Hood XM2S-0911 SECTION 2 Connections and Wiring Amplifier unit side Socket CO-MA-VV-SB 5PX28AWG • Wiring for connection to a V700-L22 CIDRW Controller The cable length should be no greater than 15 m. Amplifier unit V640-HAM11 D-SUB, 9-pin Socket type Metric screw, M2.
SECTION 2 Installation and Connections/Wiring • Wiring for connection to a PC/AT computer (9-pin connector specification) The cable length should be no greater than 15 m. SECTION 2 Connections and Wiring Amplifier unit V640-HAM11 D-SUB, 9-pin Socket type Metric screw, M2.6 PC/AT Computer D-SUB, 9-pin Socket type #4-40 Name Pin No. Pin No.
SECTION 2 Installation and Connections/Wiring RS-485 Port The method for connection to the RS-485 port of another Amplifier Unit when multiple CIDRW Heads are used is explained here. To the RS-485 port Amplifier Unit SECTION 2 Connections and Wiring CIDRW Controller To the RS-232C port The maximum total length of RS-485 cable is 50 m. • Connector Prepare a V640-A90 (can be purchased as an accessory) as the connector for the RS-485 port on the Amplifier Unit. Refer to page 35.
SECTION 2 Installation and Connections/Wiring • Notes on cables Recommended model Manufacturer Model Cable RS-485 signal wire Tachii Electric Wire MVVS 2CX0.5SQ Crimp terminals When one wire is connected to each terminal. Phoenix Contact AI0.5-8WH SECTION 2 Connections and Wiring When two wires are connected to each terminal. AI-TWIN2×0.5-8WH Crimping tool CRIMPFOX UD6 • Wiring method 1. Attach crimp terminals to stripped portions of the cables. 2.
SECTION 2 Installation and Connections/Wiring Link Unit Power Supply Opening the cover on the top face of the Link Unit exposes the power supply terminals. SECTION 2 Connections and Wiring 24 VDC • Crimp terminals The terminal screws on the terminal block are M3 size. Use appropriate crimp terminals for M3 screws as shown below. Crimp terminals Shape Size Forked 6 mm max. Round 6 mm max. • Power supply Use a power supply unit that satisfies the following conditions.
SECTION 2 Installation and Connections/Wiring Host Connection Port The method for connecting to a CIDRW Controller or host device via the RS-232C port is explained here. CIDRW Controller Link Unit SECTION 2 Connections and Wiring To host device port To ID port Host Link Unit To host device port To the RS-232C port • Connector The host device connection port on the Link Unit is a D-SUB, 9-pin connector. The pin arrangement is shown below.
SECTION 2 Installation and Connections/Wiring Pin No.
SECTION 2 Installation and Connections/Wiring • Wiring for connection to a PC/AT computer Link unit V700-L11 D-SUB, 9-pin Socket type #4-40 PC/AT Computer D-SUB, 9-pin Socket type #4-40 Pin No. Pin No. Name NC 1 1 NC RD 2 2 RD SD 3 3 SD NC 4 4 NC SG 5 5 SG NC 6 6 NC RS 7 7 RS CS 8 8 CS NC 9 9 NC SECTION 2 Connections and Wiring Name Ground shielded wires at the PC/AT computer side.
SECTION 2 Installation and Connections/Wiring Multi-connection port The method for connecting to an Amplifier Unit is explained here. Link Unit SECTION 2 Connections and Wiring To multi-connection port To the RS-485 port Amplifier Unit • Connector Pin No. Name Function 5 - No wiring is required. (Short with terminal 2 within the circuit) 4 + No wiring is required. (Short with terminal 1 within the circuit) 3 GR Ground to 100 Ω or less.
SECTION 2 Installation and Connections/Wiring • Cable Recommended Product Manufacturer Cable Crimp terminals RS-485 signal wire Tachii Electric Wire Frame ground line AWG22 - 20 cable When one wire is connected to each terminal. Phoenix Contact SECTION 2 Connections and Wiring When two wires are connected to each terminal. Crimping tool Model MVVS 2CX0.5SQ AI0.5-8WH AI-TWIN2×0.5-8WH CRIMPFOX UD6 • Wiring method 1. Attach crimp terminals to stripped portions of the cables. 2.
SECTION 3 Preparing for Communications Set the Communications Conditions for Amplifier Units 61 Set the Communications Conditions for Link Units 63 Communications Test 65 CIDRW System User’s Manual SECTION 3 Preparing for Communications Set the Communications Conditions for the CIDRW Controller 48 47
SECTION 3 Preparing for Communications Set the Communications Conditions for the CIDRW Controller Set the communications conditions of the CIDRW Controller only when SECS is used. 1 2 3 4 5 6 Switch to the Setting mode. Start the terminal software. Set the parameters for the communications conditions. Change the Carrier ID Change the Data segment area. Change the response time-out time.
SECTION 3 Preparing for Communications 3. When all of the devices to be used are connected, turn the power ON. The system starts up in the Setting mode, and the indicators react as shown below. OPERATING ALARMS BUSY ERROR Sending a Switching Command from the Host Device This method is convenient when the unit has already been mounted and the switch on the bottom cannot be repositioned to "3." the Setting mode. 1. Send a subsystem command (S18F13 ChangeState CPVAL1 = "PS") from the host device.
SECTION 3 Preparing for Communications Set the parameters for the communications conditions Specify the parameters whose settings are to be changed from the terminal software of the host device. The commands, and the parameters that can be set are indicated below. List of Commands Designation Parameter designation Command Input Explanation (Tag name) = (Set value) Specify the parameter value corresponding to the tag name.
SECTION 3 Preparing for Communications 1. Specify the parameters to be changed. When the first parameter is specified, the ALARMS indicator flashes. S_BAUD=19200 S_DEVID=1 S_BNO=0 _ 2. Confirm the parameter change. The input parameter is checked and written. ::END _ The ALARMS indicator lights. When writing is completed without error SETUP_COMPLETE _ If writing is completed with an error, the parameters are not updated.
SECTION 3 Preparing for Communications ! Check for Correct Setting The currently set data can be output so that you can check if it is correct. 1. Send the parameter output command "::GET_PARAM" ::GET_PARAM from the host device. The current communication parameter settings are displayed. SECTION 3 Set the Communications Conditions for the CIDRW Controller S_BAUD=19200 S_DEVID=1 S_T1=0.5 S_T2=10.
SECTION 3 Preparing for Communications 1. Specify the parameters to be changed. When the first parameter is specified, the ALARMS indicator flashes. CIDOF=0 CIDLN=16 2. Confirm the parameter change. The input parameter is checked and written. ::END _ SECTION 3 Set the Communications Conditions for the CIDRW Controller Check for Correct Setting The currently set data can be output so that you can check if it is correct. 1.
SECTION 3 Preparing for Communications Tag Name List Parameter Tag name Setting range Default setting Number of bytes in the carrier ID T_CIDLEN 16 (fixed) The setting must maintain the following relationship (CIDOF + CIDLN) ≤ T_CIDLEN 16 Segment name T_SEGN "S01" to "S99" "S01" to "S28" Number of bytes in a segment T_SEGL 8 (fixed) 8 1. The form of the input from the host device is shown in the SECTION 3 Set the Communications Conditions for the CIDRW Controller figure to the right.
SECTION 3 Preparing for Communications Check for Correct Setting The currently set data can be output so that you can check if it is correct. 1. Send the parameter output command "::GET_SEG" from the host device. ::GET_SEG SECTION 3 Set the Communications Conditions for the CIDRW Controller The data segment area is displayed.
SECTION 3 Preparing for Communications Change the response time-out time In the initial settings of the CIDRW Controller, when ID Tag (RI-TRP-DR2B, made by Texas Instruments) data is read or written, a "response time-out" may occur. Be sure to set the response time-out time to "10 s." The commands, and the parameters that can be set are indicated below.
SECTION 3 Preparing for Communications Check for Correct Setting The currently set data can be output so that you can check if it is correct. 1. Send the parameter output command "::GET_E99SYS" ::GET_E99SYS from the host device. The current operation parameter settings are displayed. Do not change operation parameters other than RT, CIDOF, and CIDLN. This can cause the system to stop operating correctly.
SECTION 3 Preparing for Communications 2. Confirm the parameter change. The input parameter is checked and written. ::END _ Check for Correct Setting The currently set data can be output so that you can check if it is correct. 1. Send the parameter output command "::GET_VER" from ::GET_VER the host device. RVER=1.10 ::END _ Return to the Normal Operation mode When the Mode is Selected with the Mode Switch on the Bottom of the Unit 1. Turn OFF the power to the CIDRW Controller. 2.
SECTION 3 Preparing for Communications Reference: List of Commands Designation Command input Parameter designation Explanation (Tag name) = (Set value) Specify the parameter value corresponding to the tag name. Parameter confirmation ::END Checks the parameter designations that have been received so far and, if there is no error, confirms the settings. Comment This is ignored as the comment line.
SECTION 3 Preparing for Communications Tag Name List Classification E99 SECTION 3 Set the Communications Conditions for the CIDRW Controller 60 CIDRW System User’s Manual Parameter Tag name Setting range Default setting Response timeout time RT 10.0 s (fixed) 2.
SECTION 3 Preparing for Communications Set the Communications Conditions for Amplifier Units Set the communications conditions using the DIP switches on the side face of the Amplifier Unit. After changing the DIP switch settings, restart the system. The new settings will not become effective until the system is restarted. RS-485 terminator Always OFF (Not used in this CIDRW system) Node No. DIP-SW Node No.
SECTION 3 Preparing for Communications Communications conditions Item RS-232C Communications control protocol 1:N protocol exclusive to OMRON Synchronization method Start-stop synchronization Baud rate Set using a DIP switch Frame composition SECTION 3 Set the Communications Conditions for Amplifier Units 62 Specifications Standard conformed to Error detection CIDRW System User’s Manual Start bit Data bits Parity bit Stop bit Total 1 8 None 1 10 FCS (frame check sequence)
SECTION 3 Preparing for Communications Set the Communications Conditions for Link Units Set the communications conditions by setting the DIP switches. Node No. Baud rate Always OFF (Not used in this CIDRW system) Node No. (fixed) DIP-SW 1 2 3 4 5 ON ON ON ON ON The node numbers for Link Units are fixed. Check that DIP switches 1to 5 are all ON.
SECTION 3 Preparing for Communications Communications conditions Item Standard conformed to RS-232C Communications control protocol 1:N protocol exclusive to OMRON Synchronization method Start-stop synchronization Baud rate Set using a DIP switch Frame composition SECTION 3 Set the Communications Conditions for Link Units 64 Specifications Error detection CIDRW System User’s Manual Start bit Data bits Parity bit Stop bit Total 1 8 None 1 10 FCS (frame check sequence)
SECTION 3 Preparing for Communications Communications Test Test for Communications with the Host Device Check if the host device, CIDRW Controller, and Amplifier Units are correctly connected. When SECS is Used Amplifier Unit CIDRW Controller SECTION 3 Communications Test Host • Connection between host device and CIDRW Controller Send Are You There Request message "S1, F1" from the host device. If it is correctly connected, On Line Data "S1, F2" will be sent from the CIDRW Controller.
SECTION 3 Preparing for Communications ID Tag ↔ CIDRW System Communications Test Send a command from the host device and check that normal communication with the ID Tag is possible. When SECS is Used • Read ID The host device sends a Read ID Request message to the CIDRW Controller for Head 1. The CIDRW Head 1 reads the ID, and the CIDRW Controller returns the ID to the host device.
SECTION 3 Preparing for Communications • Write ID (1) The CIDRW Controller is in IDLE. The host device requests the CIDRW Controller change its operational status to MAINTENANCE. (2) The CIDRW Controller changes to MAINTENANCE and replies that it has changed state. (3) The host device sends a Write ID Request message to the CIDRW Controller for Head 1. The CIDRW Head 1 writes ID, and the CIDRW Controller returns the ID to the host devices.
SECTION 3 Preparing for Communications When SECS is Not Used • Read Reading the page 1 and page 3 data of node No.1: Data content of the ID Tag Page 1 12h 34h 56h 78h 90h 12h 34h 56h 11h 22h 33h 44h 55h 66h 77h 88h Page 2 Page 3 Page 4 SECTION 3 Communications Test Command SOH Node No.
SECTION 4 Reading from/Writing to ID Tags When SECS is Used 70 When SECS is Not Used 81 SECTION 4 Reading from/Writing to ID Tags CIDRW System User’s Manual 69
SECTION 4 Reading from/Writing to ID Tags When SECS is Used The SEMI standards are subject to revision: you must refer to the actual standards. • SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD • SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II) • SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I) SECS Protocol Specifications Refer to page 124.
SECTION 4 Reading from/Writing to ID Tags Data Item Dictionary SECS II data items Name Format 20 Value SSACK Result status List of STATUS Status CPVAL State request 20 "OP", "MT", "PS" *1 TARGETID Target ID 20 "00"-"31" "00" indicates the CIDRW Controller itself. SSCMD Subsystem commands 20 "ChangeState" "GetStatus" "PerformDiagnostics" "Reset" L,4 1. 2. 3. 4.
SECTION 4 Reading from/Writing to ID Tags Specifications for Each Stream/Function • Online check S1,F1 Are You There Request S,H→E,reply Header only S1,F2 On Line Data S,H←E L,2 1. 2. • Set MDLN (model number). • Set SOFTREV (software revision level). SECTION 4 When SECS is Used • Get attributes S18,F1 Read Attribute Request S,H→E,reply 1. "00"-"31" L,2 2.L,n 1. ⋅ n.
SECTION 4 Reading from/Writing to ID Tags • Set attributes F18,F3 Write Attribute Request S,H→E,reply 1. "00" (fixed) L,2 2.L,n 1.L,2 1. 2. n.L,2 1. 2, Since the attributes for heads are all RO in this system, the target ID is fixed as "00". Write Attribute Acknowledge S,H←E 1. "00" (fixed) SECTION 4 When SECS is Used S18,F4 L,3 2. 3.L,s 1. ⋅ s.
SECTION 4 Reading from/Writing to ID Tags • Read data S18,F5 Read Request S,H→E,reply 1. "01"-"31" L,3 2. 3. SECTION 4 When SECS is Used • When DATASEG is specified as "0" and a character string, the size of data determined by the DATALENGTH setting is read, starting from the address indicated by the DATASEG setting. If DATALENGTH = 0, data is read up to the end of the data area.
SECTION 4 Reading from/Writing to ID Tags • Write data S18,F7 Write Request S,H→E,reply 1. "01"-"31" L,4 2. 3. 4. Data Segment Area SECTION 4 When SECS is Used • If DATASEG is specified as "0" and a character string, a size of data corresponding to the DATALENGTH setting and starting from the address within the data area indicated by the DATASEG setting is written (address specification). If DATALENGTH = 0, data is written up to the end of the data area.
SECTION 4 Reading from/Writing to ID Tags • Read ID S18,F9 Read ID Request S,H→E,reply 1. "01"-"31" Data Segment Area Refer to page 122. S18,F10 Read ID Data S,H←E 1. "01"-"31" L,4 2. 3. 4.L,s 1. SECTION 4 When SECS is Used ⋅ s.
SECTION 4 Reading from/Writing to ID Tags • Subsystem command (ChangeState) S18,F13 Subsystem Command Request (ChangeState) S,H→E,reply 1. "00" (fixed) 2. "ChangeState" L,3 3.L,1 1. "OP", "MT" or "PS" CPVAL = "PS" is a parameter setting unique to this CIDRW Controller for switching to the Setting mode. S18,F14 Subsystem Command Acknowledge (ChangeState) S,H←E 1. "00" L,3 SECTION 4 When SECS is Used 2. 3.L,s 1. ⋅ s.
SECTION 4 Reading from/Writing to ID Tags • Subsystem command (GetStatus) S18,F13 Subsystem Command Request (GetStatus) S,H→Ε,reply 1. "00"-"31" 2. "GetStatus" L,3 3.L,0 S18,F14 Subsystem Command Acknowledge (GetStatus) S,H←E 1. "00"-"31" 2. "GetStatus" L,3 3.L,s 1. SECTION 4 When SECS is Used ⋅ s.
SECTION 4 Reading from/Writing to ID Tags • Subsystem command (Reset) S18,F13 Subsystem Command Request (Reset) S,H→E,reply L,3 1. "00" (fixed) 2. "Reset" 3.L,0 S18,F14 Subsystem Command Acknowledge (Reset) S,H←E 1. "00" L,3 2. 3.
SECTION 4 Reading from/Writing to ID Tags Operation Conditions The response messages and response codes (SSACK) in each state are shown below: State Message SECTION 4 When SECS is Used 80 Function Initializing Operating IDLE Maintenance BUSY S1,F1 OnlineRequest S1,F0 S1,F2 S1,F2 S1,F2 S18,F11 S18,F7 WriteID S18,F0 S18,F0 S18,F0 NO WriteData S18,F0 NO NO S18,F0 S18,F3 SetAttribute S18,F0 NO NO NO S18,F13(Reset) Reset S18,F0 NO NO NO S18,F9 ReadID S18,F0 NO NO NO
SECTION 4 Reading from/Writing to ID Tags When SECS is Not Used Command/Response Format Command SOH Node No. Command code Parameter 1 ⋅⋅⋅ FCS n 01h CR 0Dh Response Node No.
SECTION 4 Reading from/Writing to ID Tags Command Command code list Name SECTION 4 When SECS is Not Used 82 Value Function See READ 0100 When this command is received, the system communicates with the ID Tag, and reads the specified page(s) of data. Any pages up to a maximum of 16 can be selected. p.83 WRITE 0200 When this command is received, the system communicates with the ID Tag, and writes the specified page(s) of data. Any pages up to a maximum of 16 can be selected. p.
SECTION 4 Reading from/Writing to ID Tags READ Reads any pages of data from the ID Tag. The maximum number of pages that can be read at one time is 16. Command SOH Node No.
SECTION 4 Reading from/Writing to ID Tags Response SOH Node No. 01h 0 Response code 1 0 0 Page 1 Page 3 FCS CR 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 0 7 0Dh WRITE Data is written in page units to the ID Tag. Any page(s) can be specified. It is possible to write to a maximum of 16 pages at one time. SECTION 4 When SECS is Not Used Command Write data Node SOH No.
SECTION 4 Reading from/Writing to ID Tags Example: Writing data to pages 8 and 10 of node No.1: Command SOH Node No. 01h 0 Command Page designation code Data of page 8 Data of page 10 FCS 1 0 2 0 0 0 0 0 0 0 A 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 8 8 0 1 2 3 4 5 6 7 8 9 A BCDE F 7 4 CR 0Dh Binary notation 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 1 0 0 0 0 0 0 0 0 0 SECTION 4 When SECS is Not Used Response SOH Node No.
SECTION 4 Reading from/Writing to ID Tags Same Write Writes the same data to multiple pages of an ID Tag. Any page(s) can be specified. Command SOH Node No.
SECTION 4 Reading from/Writing to ID Tags Byte Write Writes data to any specified number of bytes starting from the address specified in the ID Tag. The maximum number of bytes that can be written at one time is 128. Command SOH Node No. 01h 0 4 0 Write data First address Command code Data 1 ••• Data n FCS CR 0 0Dh * Data number n = number of bytes written to (2-character units) Parameter description Description Addresses can be specified in the range 00h to 87h.
SECTION 4 Reading from/Writing to ID Tags TEST Performs a communication test on communications between the host device and Amplifier Unit. When an Amplifier Unit receives a test command, it sends the response code and command test data to the host device as the response. Command SOH Node No.
SECTION 4 Reading from/Writing to ID Tags NAK Sends the response made immediately before again. Command SOH Node No. 01h Command code 1 FCS 2 CR 0Dh Response Sends the response made immediately before again. SECTION 4 When SECS is Not Used Noise measurement The levels of noise in the vicinity of the CIDRW Head are measured and the noise level is expressed numerically in the range "00" to "99." Command SOH Node No.
SECTION 4 Reading from/Writing to ID Tags MEMO SECTION 4 When SECS is Not Used 90 CIDRW System User’s Manual
SECTION 5 Troubleshooting When SECS is Used 92 When SECS is Not Used 98 SECTION 5 Troubleshooting CIDRW System User’s Manual 91
SECTION 5 Troubleshooting When SECS is Used Errors are indicated by the contents of the CIDRW Controller response messages, and by the indicators. List of Error Messages When responses are made to messages sent by the CIDRW Controller, errors are expressed by the contents of error messages and the nature of the SSACK response.
SECTION 5 Troubleshooting Operation Check Flowchart Normal Operation Mode Error occurrence POWER-LED is off. Yes An error has occurred in the CIDRW Controller power supply. Check the power supply of the CIDRW power supply. No Yes Check the contents of the response message. When the CIDRW Controller responds to a message transmission Refer to page 94. No All LEDs are lit Yes or flashing. An error has occurred at the CIDRW Controller. Check the status of the indicators.
SECTION 5 Troubleshooting • When the CIDRW Controller responds to a message transmission There is a mistake in the message sent to the CIDRW Controller or the Amplifier Unit settings. After taking the appropriate corrective action, restart the Controller and the Amplifier Unit and send the message again. Response S — Main check points F 0 Status conditions when the message was issued (e.g.
SECTION 5 Troubleshooting • When the CIDRW Controller fails to respond to messages sent to it There is a mistake in the CIDRW Controller or Amplifier Unit settings. After taking the appropriate corrective action, restart the CIDRW Controller and Amplifier Unit.
SECTION 5 Troubleshooting Setting Mode Error occurrence POWER-LED is OFF Yes An error has occurred in the CIDRW Controller power supply. Check the power supply of the CIDRW Controller. No All LEDs are lit Yes or flashing. An error has occurred at the CIDRW Controller. Check the status of the indicators. When all the LEDs are lit or flashing SECTION 5 When SECS is Used No Check if the CIDRW Controller settings are correct.
SECTION 5 Troubleshooting • When all the LEDs are lit or flashing An error has occurred in the CIDRW Controller. After taking appropriate corrective action, restart the CIDRW Controller and check the indicators. POWER OPERATING ALARMS BUSY ERROR Main check points • Supply of 24 VDC power • The CIDRW Controller may be damaged. • Mode switch setting (Is the setting "3"?) If the error cannot be resolved after checking, the CIDRW Controller may be damaged. • The CIDRW Controller may be damaged.
SECTION 5 Troubleshooting When SECS is Not Used Errors are indicated by the presence or absence of a response to an Amplifier Unit command, and by the indicators. List of Error Messages Type Host communications error 14 Name Description SECTION 5 When SECS is Not Used Format error There is a mistake in the command format. (E.g. the command portion is undefined, or the page or address specification is inappropriate.
SECTION 5 Troubleshooting Operation Check Flowchart From Installation to Trial Operation Errors are indicated by whether or not a response to the test command is received and by the status of the Amplifier Unit indicators. Error occurrence RUN-LED is OFF Yes An error has occurred at the Amplifier Unit. Amplifier Unit error Refer to page 100. No SECTION 5 When SECS is Not Used Test command transmission Response received Yes Check the nature of the response.
SECTION 5 Troubleshooting • Amplifier Unit error Check the status of the indicator LEDs after transmission of the test command. After taking appropriate corrective action, restart the Amplifier Unit, send the test command again and check again.
SECTION 5 Troubleshooting From Trial Operation to Communications Errors are indicated by the status of the indicators after transmission of the write command, and by the response code of the response. Error occurrence Write command sent RUN-LED is OFF Yes An error has occurred at the Amplifier Unit. Amplifier Unit error Refer to page 102. No code 1 Yes Check the command format. If the response code is 1 ? Refer to page 102.
SECTION 5 Troubleshooting • Amplifier Unit error Check the status of the indicator LEDs after transmission of the command. After taking appropriate corrective action, send the write command again and check again. RUN COMM NORM ERROR — Main check points • Influence of background noise (Change installation position) • Amplifier Unit power supply (If RUN is OFF, the status of the other indicaIf the error cannot be resolved by checking the two points above, tor LEDs can be ignored.
SECTION 6 Appendix 104 System Configuration Examples 108 When SECS is Not Used 109 Characteristic Data depending on Conditions of Use 110 Data Segment Area 122 Regular Inspection 123 SECS Protocol Specifications 124 ASCII Code Table 129 Protective Construction 130 CIDRW System User’s Manual SECTION 6 Appendix Specifications and Dimensions 103
SECTION 6 Appendix Specifications and Dimensions Controller V700-L22 (Unit: mm) Mounting dimensions r Power indicator r / Indicators SECTION 6 Specifications and Dimensions 104 2 : Item (mounting Four, 4.5-dia. holesholes) Ǿ Specifications Power supply voltage 24 VDC +10% -15% Current consumption 150 mA max. (inrush current: approx. 10 A max.
SECTION 6 Appendix Amplifier Unit V640-HAM11 (Unit: mm) 㧔 㧕 㧔 㧕 㧔 㧕 㧔 㧕 㧔 㧕 㧔 㧕 㧔 㧕 㧔 㧕 4 indicators 㧔 㧕 DIP switch Four, 4.5-dia. holes Ǿ SECTION 6 Specifications and Dimensions Mounting dimensions r r / Item Specifications Power supply voltage 24 VDC +10% -15% Current consumption 150 mA max.
SECTION 6 Appendix CIDRW Head V640-HS61 (Unit: mm) Four, 3.5-dia. holes Ǿ Antenna center Connector Coaxial cable 3.0 dia., standard length 2 m Mounting dimensions Four / 14 Ǿ M3 or 3.5-dia.
SECTION 6 Appendix Link Unit V700-L11 (Unit: mm) Two, 4.5-dia. holes Ǿ SECTION 6 Specifications and Dimensions r Mounting dimensions r Two M4 or 4.2-dia. holes / ޓ14ޓǾ Item Specifications Power supply voltage 24 VDC +10% -15% Current consumption 250 mA max. (inrush current: approx.
SECTION 6 Appendix Communications Time Regardless of whether SECS is used or not, take the time required for processing between the host device and Amplifier Units into account when designing the system. Host Response Command Amplifier Unit Communications time TAT Time Description SECTION 6 Characteristic Data depending on Conditions of Use Communications time This is the time required for communication between an ID Tag and the CIDRW Head.
SECTION 6 Appendix The graph for communications time for communication between the ID Tag and CIDRW Head, and TAT (when the baud rate is 9600 bps), is shown below. Note however that the communications time and TAT may increase substantially according to the conditions of use.
SECTION 6 Appendix Byte Write Communications time TAT (9600 bps) Communications time (ms) SECTION 6 Characteristic Data depending on Conditions of Use 120 CIDRW System User’s Manual Number of bytes processed
SECTION 6 Appendix Data Segment Area The data segment area of the RI-TRP-DR2B ID Tag is shown below. When using a CIDRW Controller, always set the data segment. Refer to page 53.
SECTION 6 Appendix Regular Inspection In order to maintain optimum performance of the functions of the CIDRW system, daily and periodic inspections are necessary. Inspection item Supply voltage fluctuation Environment Ambient temperature Detail Criteria Check that the supply voltage fluctuation at the power supply terminal block is within the permissible range. To be within supply voltage rating. Multimeter Check that there are no frequent instantaneous power failures or radical voltage drops.
SECTION 6 Appendix SECS Protocol Specifications A summary of the SEMI standards that relate to CIDRW is provided for reference when using this product. However, since the SEMI standards are subject to revision, you should also refer to the actual standards.
SECTION 6 Appendix Protocol Specifications • Character composition Start bit (1) + data bits (8) + stop bit (1) * Conforms to SEMI E4 • Protocol parameters Sign BAUD Name Baud Rate Default setting 9600 Setting unit Setting range 1200, 2400, 4800, 9600, 19200, 38400, 57600, 115200 - DEVID Device ID 0 0 to 32767 1 T1 Time-out between characters 0.5 s 0.1 to 10 s 0.1 s T2 Protocol time-out 10 s 0.2 to 25 s 0.
SECTION 6 Appendix • Storing The method for storing in the BUSY status, e.g. because the internal buffer is full, is to use "NAK transmission." • Processing for time-out detection At T3 and T4 time-outs, the time-out is notified by the S9F9 message. • SECS parameters Item Range Setting Unit 1: The header of the block currently being received is compared with the correct block received immediately before, and double blocks are detected. 0: Double block detection is not performed.
SECTION 6 Appendix Support Attributes CIDRW attribute definitions Attribute names Basic items "Configuration" Request Format and mounting Y 20 "00"-"31" The number of heads connected when the system power is turned ON (automatic recognition) Substate of current CIDRW RO alarms Y 20 Substate of current CIDRW RO operations Y "SoftwareRevisionLevel" Software revision (version) RO Y 20 6byte "VVV.
SECTION 6 Appendix Reader/writer head attribute definition Attribute names Basic items "HeadStatus" Description Current status Access RO Request Y Format and mounting 20 "IDLE" "BUSY" "NOOP" Option Head number 1 to 31 RO "Cycles" Number of read/write oper- RO ations executed N 54 (unsigned 4-byte integer) (Not supported by the Reader/ Writer Head) "HeadCondition" Maintenance status N 20 RO Y 20 (multi) "01"-"31" ("00" indicates the CIDRW itself, so cannot be used.
SECTION 6 Appendix ASCII Code Table Leftmost bits b8 - b5 0000 1001 0010 0011 0100 0101 0110 0 1 2 3 4 NUL TC7(DLE) 0111 1000 1101 1010 1011 1100 1101 1110 1111 Rightmost bits Row b4 - b1 5 6 7 8 9 10 11 12 13 14 15 Line 0 (SP) 0 @ P ` p 0001 1 TC1(SOH) DC1 ! 1 A Q a q 0010 2 TC2(STX) DC2 " 2 B R b r 0011 3 TC3(ETX) DC3 # 3 C S c s 0100 4 TC4(EOT) DC4 $ 4 D T d t 0101 5 TC5(NEQ) TC8(NAK) % 5 E U e u 0110 6 TC6(ACK) TC9(SYN)
SECTION 6 Appendix Protective Construction IP- is governed by the test methods described below. Check in advance the seal characteristics under the actual environment and conditions of use. IP is the abbreviation of International Protection.
SECTION 6 Appendix Class Degree of protection Outline of test methods (tests using water) 3 Protection against spraying water 4 Protection against splashing The product suffers no ill water effects from water splashed on it from all directions. 5 Protection against water jets 6 Protection against powerful jets of water The product suffers no ill effects from a water spray directed at it at up to 60° from vertical.
SECTION 6 Appendix Index A I Amplifier Unit Amplifier Unit Indicators Amplifier Unit V640-HAM11 ASCII Code Table ID Tag ↔ CIDRW System Communications Test IEC (International Electrotechnical Commission) Standard (IEC605291989-11) Influence of Background Metal on ID Tag Influence of Background Metals (Reference Only) Influence of Noise Installation 27, 34 98 20 129 B Byte Write 87 66 130 29 117 29 26 L C SECTION 6 Index Change the data segment area 53 Change the response time-out time 56 Changing
SECTION 6 Appendix Index R READ Regular Inspection RESET Return to the Normal Operation mode RS-232C Port RS-485 Port 83 123 89 58 36 39 Same Write SECS port SECS Protocol Specifications Sending a Switching Command from the Host Device Set the Communications Conditions for Amplifier Units Set the Communications Conditions for Link Units Set the Communications Conditions for the CIDRW Controller Set the parameters for the communications conditions Setting Mode Specifications and Dimensions Specifications
