User's Manual

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Table Of Contents

Read and Understand this Manual
Warranty
Limitations of Liability
Suitability for Use
Programmable Products
Change in Specifications
Dimensions and Weights
Errors and Omissions
Applicable Standards
Applicable SEMI Standards
Precautions for Safe Use
Precautions for Correct Use
- Installation Site
- Mounting
- Power and Ground Cables
- Wiring Work
- Screw Locking Adhesive
- Cleaning
Editor’s Note
- Visual Aids
- Indicator Statuses
Table of Contents
What is a CIDRW System?
Features
- CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)
System Configuration
- When SECS is Used
- When SECS is Not Used
Component Names and Functions
- CIDRW Controller V700-L22
- Amplifier Unit V640-HAM11
- CIDRW Head V640-HS61
- Link unit V700-L11
Flowchart for Getting Started
Installation
- CIDRW Controller
- Amplifier Unit
- CIDRW Head
- Link Unit
Connections and Wiring
- CIDRW Controller
  - Power Supply and Grounding Wires
  - SECS port
- Amplifier Unit
- Link Unit
Set the Communications Conditions for the CIDRW Controller
- Switch to the Setting mode
  - Changing the Position of the Mode Switch on the Bottom of the Unit
  - Sending a Switching Command from the Host Device
- Start the terminal software
- Set the parameters for the communications conditions
  - Check for Correct Setting
- Change the Carrier ID
  - Check for Correct Setting
- Change the data segment area
  - Check for Correct Setting
- Change the response time-out time
  - Check for Correct Setting
- Set Software Revisions
  - Check for Correct Setting
- Return to the Normal Operation mode
  - When the Mode is Selected with the Mode Switch on the Bottom of the Unit
  - When the Mode is Selected by a Command Sent from the Host Device
- Reference:
Set the Communications Conditions for Amplifier Units
Set the Communications Conditions for Link Units
Communications Test
- Test for Communications with the Host Device
  - When SECS is Used
  - When SECS is Not Used
- ID Tag - CIDRW System Communications Test
  - When SECS is Used
  - When SECS is Not Used
When SECS is Used
- Message Specifications
  - Specifications for Each Stream/Function
  - Operation Conditions
When SECS is Not Used
- Command/Response Format
- Command
When SECS is Used
- List of Error Messages
- Controller Indicators
- Operation Check Flowchart
  - Normal Operation Mode
  - Setting Mode
When SECS is Not Used
- List of Error Messages
- Amplifier Unit Indicators
- Operation Check Flowchart
  - From Installation to Trial Operation
  - From Trial Operation to Communications
Specifications and Dimensions
Data Segment Area
Regular Inspection
SECS Protocol Specifications
- Operation Model
- Protocol Specifications
- Support Attributes
ASCII Code Table
Protective Construction
- IEC (International Electrotechnical Commission) Standard (IEC60529: 1989-11)

SECTION 1

Flowchart for Getting Started

CIDRW System

User’s Manual

SECTION 1

Product Outline

Refer to page 70.

Refer to page 81.

Refer to page 92. List of Error Messages

Refer to page 92. Controller Indicators

Refer to page 93. Operation Check Flowchart

Refer to page 98. List of Error Messages

Refer to page 98. Amplifier Unit Indicators

Refer to page 99. Operation Check Flowchart

When SECS is Used

When SECS is Not Used

When SECS is Used

When you Encounter a Problem...

Communications