Datasheet MICS6814

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Data Sheet

The MiCS-6814 is a compact MOS sensor with three fully

independent sensing elements on one package.

The MiCS-6814 is a robust MEMS sensor for the

detection of pollution from automobile exhausts and for

agricultural/industrial odors.

MiCS-6814

1143 rev 8

SGX Sensortech, Courtils 1

CH-2035 Corcelles-Cormondrèche

Switzerland

www.sgxsensortech.com

For more information please contact:

info.em@sgxsensortech.com

Features

• Smallest footprint for compact designs

(5 x 7 x 1.55 mm)

• Robust MEMS sensor for harsh environments

• High-volume manufacturing for low-cost

applications

• Short lead-times

Detectable gases

• Carbon monoxide CO 1 – 1000ppm

• Nitrogen dioxide NO

0.05 – 10ppm

• Ethanol C

OH 10 – 500ppm

• Hydrogen H

1 – 1000ppm

• Ammonia NH

1 – 500ppm

• Methane CH

>1000ppm

• Propane C

>1000ppm

• Iso-butane C

>1000ppm

0.01

0.10

1.00

10.00

100.00

0.01 0.1 1 10 100

Concentration [ppm]

Rs/R0

Hydrogen

NO2

RED sensor, continuous power ON, 25°C, 50% RH

OX sensor, continuous power ON, 25°C, 50% RH

0.01

0.10

1.00

10.00

0.1 1 10 100 1000 10000 100000

Concentration [ppm]

Rs/R0

Ethanol

Hydrogen

Methane

Propane

Iso-butane

Ammonia

0.01

0.10

1.00

10.00

0.1 1 10 100 1000 10000 100000

Concentration [ppm]

Rs/R0

Ethanol Hydrogen

Methane

Propane

Iso-butane

Ammonia

H2S

Page 1 of 5

0.0

0.1

1.0

10.0

1 10 100 1000 10000 100000

Concentration [ppm]

Rs/R0

Hydrogen

Ethanol

Ammonia

Propane

Iso-butane

NH3 sensor, continuous power ON, 25°C, 50% RH

Summary of content (5 pages)

PAGE 1
MiCS-6814 1143 rev 8 Data Sheet The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. The MiCS-6814 is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors. 10.00 10.00 Ethanol CO CO Hydrogen Features 1.00 1.00 Rs/R0 Rs/R0 • Smallest footprint for compact designs (5 x 7 x 1.
PAGE 2
MiCS-6814 1143 rev 8 Data Sheet Performance RED sensor Characteristic RED sensor Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 100 1500 kΩ Typical CO detection range FS 1 1000 ppm Sensitivity factor (see note 2) S60 - 1.2 50 - Symbol Typ Min Max Unit Sensing resistance in air (see note 1) R0 - 0.8 20 kΩ Typical NO2 detection range FS 0.
PAGE 3
Data Sheet Power circuit and measurement circuit MiCS-6814 1143 rev 8 MiCS-6814 with recommended supply circuit (top view) MiCS-6814 with measurement circuit (top view) R1 is 130 Ohms, R2 is 820 Ohms and R3 is 27 Ohms. These resistors are necessary to obtain the right temperatures on the three independent heaters while using a single 5 V power supply. The resulting voltages are typically VhRED = 2.4 V, VhOX = 1.7 V and VhNH3 = 2.2 V.
PAGE 4
Data Sheet MiCS-6814 1143 rev 8 Package outline dimensions The package is compatible with SMD assembly process. Pin Connection A Rs2 B Rh1 RED, Rs1 RED C Rh1 NH3 Rs1 NH Operating Dconditions 3 E Rh2 NH3 F Rs2 NH3 G Rh2 RED H Rs2 RED J Rh1 OX, Rs1 OX K Rh2 OX MiCS-6814 configuration (bottom view) Sensor configuration The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top.
PAGE 5
Data Sheet MiCS-6814 1143 rev 8 Packaging Power circuit The sensors are packaged in a tape and reel for expedition. The two resistors (82 ohm for RED and 51+82 The are necessary placed in atocarrier The ohmsensors for OX) are obtaintype. the right dimensions ofon thethe cavity 5.5 x 7.5 xheaters 2.55 mm temperatures two are independent (the tolerance is +/- 0.2 mm). while using a 5V power supply. The outside dimension of the reel is either 178 +- mm (for a maximum of 700 sensors ) or 330 + 0.