Datasheet MICS6814

Data Sheet
Package outline dimensions
The package is compatible with SMD assembly process.
Operating conditions
MiCS-6814
1143 rev 8
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an
embedded heating resistor and the sensing layer on top.
The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor
chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other
detects NH
3
. The internal connections are shown above.
Pin Connection
A Rs2
B Rh1 RED, Rs1 RED
C Rh1 NH
3
D Rs1 NH
3
E
Rh2 NH
3
F
Rs2 NH
3
G
Rh2 RED
H
Rs2 RED
J
Rh1 OX, Rs1 OX
K
Rh2 OX
MiCS-6814 configuration (bottom view)
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