User's Manual

TES-63 Source
User manual – version 06/2021
Page 15/46
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4 Hardware installation
WARNING
The source and its control rack can exhibit hazardous voltage levels. They should be
operated by properly trained staff only. Operators must follow the instructions in this
manual..
CAUTION
Never use the source or the control rack in a manner different from that described in
this manual.
4.1 Installation pre-requisites
Electrical
Breaker
Differential
Power plug
IEC 230V
Fuse
2 Amp
Gas
Gas purity grade
99.995% purity or higher
Gas input pressure
0.1-1 bar
Gas flowrate
0.01-10 sccm
Pumping speed
300-1000L/s
Ambient
Temperature,
15-35 degC
humidity
40-60 % relative
4.2 Installation of the source
a) Mounting the ion source CF63
Mount the ion source flange according to the expected position of the gas inlet valve and cables.
CAUTION
Avoid any significant mechanical shock on the ion source body. Do not let the ion source
fall on the ground.
Avoid any dust/scratch/fiber on the vacuum seal surfaces in order to prevent any leak
Use the specified tightening torque of 20NM and star shape tightening pattern in order
to prevent any leak