User's Manual

TES-63 Source
User manual – version 06/2021
Page 22/46
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If the light is green (ON), the element is enabled, otherwise it is grey (OFF). These parameters are
visible in the upper right part of the user interface.
When the high voltage is switched off, the polarity of each high voltage power supply can be changed
with “Pol beam” and “Pol foc” buttons.
6.2 Setting the parameters
a) Parameters related to the source gas regulation:
The program regulates the source gas through the command called "Gas Inlet" in units of volt. The
associated flow will depend on the pressure in the gas supply line.
If a pressure gauge is installed and correctly connected to the control rack (Data Enter, see IX. Circuit
diagram of the control rack), the chamber pressure will be shown in units of volt under "Pressure".
You can also enter a formula to change the pressure value from volt to a given unit in the “Pressure
formula” box located below the plot legends.