User's Manual

TES-63 Source
User manual – version 06/2021
Page 23/46
Polygon Physics SAS au capital social de 72 000 euros - 19, rue de Sassenage - 38600 Fontaine
SIREN 799 584 453 RCS Grenoble - TVA intracommunautaire FR 19 799584453 - APE 2899B
b) Parameters related to the UHF power:
The program controls the UHF power that is sent to the source, between 0 and about 18W (the
maximum value can change, depending on the calibration mode, the cable and the generator itself.
The value in Watt is the power at the entrance of the flange).
The top box (white) is where the requested power is entered. The lower box (grey) gives the power
value that is being read. These two should be the same or very close. If that is not the case, there is a
problem that needs to be identified.
By pressing the "Pulse max" button the UHF power will temporarily jump to his maximum power, until
the button is released. The source ignition is discussed later in this manual.
The ‘Pulse max’ button can be used to help ignite the plasma for manual start-up of the
source.
c) Beam parameters:
The beam voltage is defined by the high voltage that is applied to the source body. The high voltage
applied to the source body is operated by the program and can vary between 0 and 15kV.
The top box (white) is where the requested high voltage should be entered.
The second box (white) is the maximum intensity the supply can go.
The third box (grey) gives the voltage value that is being read. These two should be the same or very
close. If that is not the case, there is a problem that needs to be identified.