User's Manual

TES-63 Source
User manual – version 06/2021
Page 8/46
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Neutral gas
Neutral gas can
replace oxygen and
cause operator
dizziness in case of
gas line leak
Near the gas line
Perform a leak check of the
gas lines during
installation/commissioning
of the equipment
2.4 Decommissioning recommendation
a) Materials and MSDS information
The TES63 product does not contains any hazardous materials (no chemical compound, no liquid, no
ionizing radiation), and can be recycled according to local national regulations for industrial products.
The ion source is composed 80% metal stainless steel and contains few tens of grams of PEEK
material and ceramics materials. The command control rack contains standards electronics parts,
PCB, and UL insulating materials. Total weight of polymer is under 100g.
b) Definitive stop procedure
Apply a Lock Out Tag Out protocol when stopping the equipment before unmounting the ion source
or the command control rack in order to avoid any electrical shock.