User's Manual

TES-63 Source
User manual – version 06/2021
Page 9/46
Polygon Physics SAS au capital social de 72 000 euros - 19, rue de Sassenage - 38600 Fontaine
SIREN 799 584 453 RCS Grenoble - TVA intracommunautaire FR 19 799584453 - APE 2899B
3 Hardware description
3.1 General specifications
Source inner size
150*40*40mm
Source outer size
300*300*200mm for cable clearance
Source flange
CF63, metal ring
Source weight
1 kg
Rack size
19 inches 3U rackable
Rack weight
10 kg
Rack power rating
110-230 V AC 2A
Cable bundle length
5 m
UHF power
2,45GHz 1-15W adjustable
High voltage power
15kV 0.8mA bipolar
Electrode plasma
CuNi 0.35mm diameter
Electrode focus
Mo Conical 1mm diameter
Electrode GND
SS 316L 1mm diameter
In vacuum materials
SS 316L, PEEK, Alumina, Kapton, Al 2024
Operating pressure
1e-6 mbar
Flow rate
0.01-1 SCCM
Suppressor (option)
Sm2co17
3.2 Functional specifications
Extracted current
4µA < ext. current < 5µA in positive polarity
Current stability
<1% pk pk over 1h, <5% pk pk over 24h
Source voltage
0-15kV
Charge state
1+, 1-
3.3 IE-GUN equipment components description
a) 19" control rack
The 19" control rack consists of two high voltage power supplies, the Ultra High Frequency (UHF)
power generator, and the control units to operate the source.
b) Source flange
The source flange holds the source itself plus its feedthroughs for operating the source (gas, UHF
power, high voltage). The flange is a CF 63 standard flange.