Specifications

Source title: Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society
Abbreviated source title: Kuei Suan Jen Hsueh Pao
Volume: 41
Issue: 3
Issue date: March 2013
Publication year: 2013
Pages: 364-369
Language: Chinese
ISSN: 04545648
CODEN: KSYHA5
Document type: Journal article (JA)
Publisher: Chinese Ceramic Society, Baiwanzhuang, Beijing, 100831, China
Abstract: A series of P-type a-Si: H films with different flow rates of borane were prepared by a
plasma enhanced chemical vapor deposition method. The influence of boron-doping amount on
the microstructures and properties of a-Si:H films was analyzed. The P-type a-Si: H film with the
optimal boron-doped amount was annealed in vacuum so as to investigate the influence of the
film crystal structure change on the properties. The results indicate that with the increase of
boron-doping amount, the microstructures of P type a-Si: H films have no substantial change, and
the band gaps and electrical properties appear varying. The optimum boron-doping amount was
proven to be 1.0%. The band gap of a-Si: H film decreased from 1.81 to 1.72 eV and the
conductivity increased by 3 orders of magnitude after annealing. The crystal structure of film
could improve the electrical properties rather than the boron-doping ratio.
Number of references: 16
Main heading: Semiconductor doping
Controlled terms: Annealing - Electric conductivity - Electric properties - Energy gap
- Metallic films - Microstructure - Plasma enhanced chemical vapor deposition -
Silicon
Uncontrolled terms: a-Si:H - Boron-doped - Boron-doping - Hydrogenated
amorphous silicon films - In-vacuum - Microstructures and properties - Optical and
electrical properties - Orders of magnitude
Classification code: 933 Solid State Physics - 932.3 Plasma Physics - 931.3 Atomic and
Molecular Physics - 714.2 Semiconductor Devices and Integrated Circuits - 951 Materials
Science - 712.1.1 Single Element Semiconducting Materials - 539 Metals Corrosion and
Protection; Metal Plating - 537.1 Heat Treatment Processes - 531 Metallurgy and
Metallography - 701.1 Electricity: Basic Concepts and Phenomena
DOI: 10.7521/j.issn.0454-5648.2013.03.15
Database: Compendex
Compilation and indexing terms, © 2013 Elsevier Inc.
8.
Accession number: 20131916309724
Title: Depth adaptive zooming visual servoing for a robot with a zooming camera
Authors: Xin, Jing1 ; Chen, Kemin1 ; Bai, Lei1 ; Liu, Ding1 ; Zhang, Jian2/辛菁;;;刘丁;;
Author affiliation: 1 School of Automation and Information Engineering, Xi'An University of
Technology, China