Specifications

Uncontrolled terms: Active regions - Diffusion parameters - Maximum output power -
Metal-organic chemical vapour depositions - Non-absorbing windows - Quantum well
intermixing - QWI - Semi conducting III-V materials
Classification code: 913.4 Manufacturing - 804.1 Organic Compounds - 802.3 Chemical
Operations - 802.2 Chemical Reactions - 744.4.1 Semiconductor Lasers - 744.1 Lasers,
General - 714.2 Semiconductor Devices and Integrated Circuits
DOI: 10.1504/IJNM.2013.056063
Database: Compendex
Compilation and indexing terms, © 2013 Elsevier Inc.
5.
Accession number: 20133716741511
Title: The application of double-layer silicon nitride films on the solar cell anti-reflection
coatings
Authors: Ma, X.J.1 ; Lin, T.1 ; Chen, Q.B.1 ; Zhang, M.S.1/;林涛;;;
Author affiliation: 1 School of Automation and Information Engineering, Xi'an University of
Technology, Xi'an, Shaanxi, 710048, China
Corresponding author: Lin, T. ([e-mail])
Source title: International Journal of Nanomanufacturing
Abbreviated source title: Int. J. Nanomanufacturing
Volume: 9
Issue: 3-4
Monograph title: Special Issue on New Energy Materials and Nanotechnology - Part I
Issue date: 2013
Publication year: 2013
Pages: 221-228
Language: English
ISSN: 17469392
E-ISSN: 17469406
Document type: Conference article (CA)
Publisher: Inderscience Enterprises Ltd., Editorial Office, P O Box 735, Olney, Bucks., MK46 5WB,
MK46 5WB, United Kingdom
Abstract: In this paper, reflectance features, external quantum efficiency, and energy
conversion efficiency of mono-crystalline silicon solar cells with double-layer silicon nitride (SiNx)
anti-reflection coatings were investigated. The simulated results by the PC1D software showed
that the combination in which the bottom SiNx layer had a thickness of 35 nm and refractive
index of 2.3, the upper layer had a thickness of 40 nm and refractive index of 1.9 achieved a
minimum reflectance. Double-layer SiN x anti-reflection coatings were fabricated by adjusting the
ratio of SiH4:NH3 in the PECVD growth. The measurement showed that the double-layer coatings
had less reflectance than the single-layer coatings in short wavelength, while they did not show
obvious changes in the range of 380 nm to 400 nm for the intensive absorption. Although the
combination parameters were not optimum, the energy conversion efficiency of the double-layer
SiN x anti-reflection coatings solar cell was improved from 17.88% to 18.03% comparing with the
single-layer coatings. Copyright © 2013 Inderscience Enterprises Ltd.
Number of references: 7