User`s manual
Table Of Contents
- Safety Precautions
- Table of contents
- Chapter 1: Outline
- 1-1 Features
- 1-2 Controller
- 1-3 Measurement program
- [1] Positional deviation measurement
- [2] Degree of match inspection
- [3] Lead inspection
- [4] BGA/CSP inspection (IV-S32M/S33M)
- [5] Area measurement by binary conversion
- [6] Object counting by binary conversion
- [7] Object identification by binary conversion
- [8] Point measurements
- [9] Distance and angle measurement
- [10] Multiple position measurement (IV-S33M)
- [11] Multiple degree of match inspection (IV-S33M)
- Chapter 2 : Precautions for Use
- Chapter 3 : System Configuration
- Chapter 4 : Part Names and Functions
- Chapter 5 : Connection and Installation Methods
- Chapter 6 : Setting and Operating Outlines
- Chapter 7 : Simplified Menu Operation
- 7-1 Operation screen
- 7-2 Image display
- 7-3 Setting functions that are different with each controller
- 7-4 Setting procedures
- 7-5 Setting the operation conditions
- 7-6 Setting object types
- 7-7 Setting the shutter speed
- 7-8 Setting the positioning conditions
- 7-9 Setting the existence inspection conditions
- 7-10 Measurement triggering
- 7-11 Saving data
- 7-12 Specify the system conditions
- Chapter 8 : Specifications
- Chapter 9 : Operation Examples
- Glossary
- Appendix
- Alphabetical Index
9-21
9
Operation Examples (Standard menu: Positional deviation measurement)
F.IMG C1 L
VX.X
(TYPE00)
OK
MEAS XXXXms 1999-08-01 10:30
MEASURE 0 CAM1 POSI-DEVIATION
CHG-MEA CHG-REG CHG-RST CHG-C1 CHG-C2 CHG-EVAL
CUSTOM-MNU
OPS-CND MEA-CND SYS-CND CHG-TYPE NEXT-NG
RE-EXAM-NG MANL-MEAS
X0~7 Y0~7 READY
REGISTER NO(0~7)
X0=379.0 OK
Y0=214.0 OK
x0=+001.0 OK
y0=+000.0 OK
M0=+09735 OK
B0=
*3
Continued from the previous page
Press the TRG/BRT key, and the result of the positional deviation measurement of the registered positioning
mark will be displayed.
(12) Positional deviation measurement
*1 The final evaluation result will be displayed as "OK" in the upper left corner of the screen when all of the
items have been evaluated acceptable.
If there is a single unacceptable item, "NG" will be displayed.
*2 "M0 +09735" means that the degree of match (percentage of pixels that match) between pixels in the
stored image and the measured image is 97.35%.
[The acceptance and rejection criteria based on the degree of match]
In order to evaluate acceptability based on the degree of match, first an image of a good specimen is
stored for reference. Then, an image of defective specimen is compared for degree of match. Finally an
image of another good specimen is compared. These comparisons establish the degree of match to be
used for setting the limits used for working comparisons.
For example, the degree of match for a non-defective object is 90% or more and that for a defective
object is 70% or less, then the threshold value for degree of match can be set to approx. 85%. This
allows the evaluation acceptability to be made.
*3 When the final evaluation result is OK, Y0 is turned ON, and a filled box is displayed. (When the result
is NG, an empty box is displayed.)
When the auxiliary relay C112 is turned ON, Y0 is turned ON according to the condition set in step (10)
for final evaluation output.
- For details about saving data, see page 9-14.
[Display of the measured
result]
Final evaluation result (*1)
Measuring time
Registration number
Detection coordinates of the
reference image
Amount of deviation from the
reference image
Degree of match of the
reference image (*2)