User`s manual
4-3
Positional Deviation Measurement
4
1
DTECT PRECISION STANDARD
2
REGISTER NO.
0(0~7)
3
MODE
1P-SCH+1P-EDGE
4
DTECT ANGL NO
REGISTER NO.
5
MDL 0
6
MDL 1
15141312111009080706050403020100
S
F C1 BRT
SET=VALUE INPUT ESC=BACK SEL=CHNG IMG TRG=FUNC
IMG PRE-PROC
REG-COND(S)
REG-COND(E)
POSITION CORRECTION
EVALUATION
DST&ANGL
NUM-CALC
OUT
MEAS CND SCREEN COND SAVE
DTECT ANGL and ANGLE UNIT
When the "1P-SCH" or "1P-SCH + 1P-EDGE" is selected in " MODE," you can specify angle
detection.
For details about angle detection, see page 4-12.
Select a detection range on the " DTECT ANGL" line and select the units at " ANGLE UNIT."
REGISTER NO. ( MDL 0, MDL 1)
The specified modes are displayed for each register number on these lines. When a 1-point search
or 1-point edge is specified, only " MDL 0" will be available. When a 2-point search, 2-point edge,
or 1-point search and 1-point edge is specified, " MDL 1" is also available.
The "S" in the table indicates a gray search, and the "E" indicates edge detection. "X" means not
used.
• An example of mode settings
How to set the register conditions
How to enter the REG-COND setting screen
There are three methods for getting to the REG-COND setting screen.
1) On the MEAS CND setting screen, move the
cursor to " MDL 0" or " MDL 1" and press
the SET key. The cursor will move into the
table. Move the cursor to the "S" or "E" column
and press the SET key.
Note: If you press the SET key in the "X"
column, the setting will be invalid.
About "S" See pages 4-4 to 6.
About "E" See pages 4-7 to 8.
2) On the MEAS CND setting screen, press the
TRG/BRT key to move the cursor to the upper
function menu. Select the "COND" item and
then select the "REG-COND(S)" or "REG-
COND(E)" item and press the SET key.
About "REG-COND(S)"
See pages 4-4 to 6
About "REG-COND(E) "
See pages 4-7 to 8.
00 01 02 03 04 05 06 07 08 09 10 11 12 13 14 15
ＳＳＳＥＥ×××
Ｓ×ＥＥ××××
REGISTER NO.
6MDL0
7MDL1
S：Gray search
E：Edge detection
×：No setting
REGISTER0 : 2P-SCH
REGISTER1 : 1P-SCH
REGISTER2 : 1P-SCH + 1P-EDGE
REGISTER3 : 2P-EDGE
REGISTER4 : 1P-EDGE