B756–01–880 Issue F Instruction Manual EXT Split Flow Compound Turbomolecular Pumps Description 24 Volt EXT Compound Turbomolecular Pumps: EXT200/200H EXT200/200Hi EXT70/200H EXT200/200H GCMS (Reversed Body) EXT200/200H LCMS (Reversed Body) 24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160): EXT200/200H EXT200/200Hi EXT70/200H EXT200/200H GCMS EXT200/200H GCMS (Reversed Body) EXT200/200H LCMS (Reversed Body) 80 Volt EXT Compound Turbomolecular Pumps: EXT200/200H EXT200/200Hi EXT70/200
Declaration of Conformity Wq BOC Edwa.
Declaration of Incorporation We, BOC Edwards, Manor Royal, Crawley, West Sussex RH10 2LW, UK declare under our sole responsibility that the machine(s) SPLIT-FLOW EXT Compound EXT200/200Hi EXT200/200Hi EXT200/200H Turbomolecular Pump (24 Volts): B756-05-991 B756-25-991 B756-26-991 SPLIT-FLOW EXT Compound EXT200/200H EXT200/200Hi EXT200/200H Turbomolecular Pump (80 Volts): B756-O5-000 B756-25-000 B756-28-000 to which this declaration function independently.
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EXT Split Flow Compound Turbomolecular Pumps CONTENTS Section Page INTRODUCTION Scope and definitions 1 1 2 2.1 2.2 2.3 2.4 2.5 TECHNICAL DATA General Pumping media Vent gas specification and vent control data Water-cooling Materials exposed to gases pumped 3 3 3 4 4 7 3 3.1 3.2 3.3 3.3.1 3.3.2 3.3.3 3.3.4 3.3.5 3.4 3.5 3.5.1 3.5.2 3.6 3.6.1 3.6.2 3.6.
EXT Split Flow Compound Turbomolecular Pumps PAGE ii 7 7.1 7.2 7.3 7.3.1 7.3.2 7.3.3 7.4 7.4.1 7.4.2 7.4.3 7.4.4 7.4.5 7.4.6 7.4.7 7.4.
EXT Split Flow Compound Turbomolecular Pumps TABLES Table 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Mar 07 Page General 3 Vent gas and vent control data 4 Water-cooling 4 Technical data 5 List of items supplied 13 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) 16 Fault finding 23 ISX Inlet-screens 29 Inlet-strainer (interstage pumps only) 29 Inlet-flange seals 30 EXDC Drive modules 30 EXC Controllers 30 Pump-to-controller cable 31 EXT Water cooling block assem
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EXT Split Flow Compound Turbomolecular Pumps 1 INTRODUCTION 1.1 Scope and definitions PAGE 1 The EXT Split Flow Pumps are designed for use with a BOC Edwards EXDC or EXC Controller. Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment. The controller manual contains details of electrical installation. Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these instructions.
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EXT Split Flow Compound Turbomolecular Pumps 2 TECHNICAL DATA 2.1 General PAGE 3 See Table 4 Dimensions See Figures 1, 2, 3 and 4 Maximum inlet-flange temperature 70 oC Maximum magnetic field 3.5 mT Horizontal field Installation category EN61010 part 1, Category 1 Pollution degree EN61010 part 1, Category 2 TECHNICAL DATA Performance Table 1 - General 2.2 Pumping media WARNING Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.
EXT Split Flow Compound Turbomolecular Pumps You can use the pumps to pump oxygen and water vapour, subject to the following conditions: PAGE 4 • Oxygen – The oxygen concentration must be less than 20% by volume. • Water vapour - You must ensure that vapour does not condense inside the pump; refer to Section 3.6.3. TECHNICAL DATA If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier, you may invalidate the warranty on the pump.
EXT Split Flow Compound Turbomolecular Pumps Side inlet-flange DN100ISO EXT200/200H and Hi 9 kg (7.
EXT Split Flow Compound Turbomolecular Pumps Parameter PAGE 6 Minimum backing pump displacement EXT70/200H EXT200/200H and Hi 0.6 m3h-1 0.6 m3h-1 EXT200/200H GCMS* 0.6 m3h-1 EXT 200/200H ICPMS 0.6 m3h-1 TECHNICAL DATA Maximum continuous inlet pressure - water-cooling at 35 oC§ Main inlet No water cooling on GCMS and ICPMS. 2.5 x 10-3 mbar 2.5 x 10-3 mbar -1 Side inlet (2.5 x 10 Pa) 5 x 10-3 mbar (2.
EXT Split Flow Compound Turbomolecular Pumps 2.5 Materials exposed to gases pumped PAGE 7 1. TAV5 vent valve 4. Main inlet 2. 8 slots 8.4 mm wide 5. EXDC controller 3. Side inlet 6.
EXT Split Flow Compound Turbomolecular Pumps PAGE 8 TECHNICAL DATA 1. 8 slots 8.4 mm wide 4. TAV5 vent valve 2. EXDC controller 5. Main inlet 3. Backing port 6.
EXT Split Flow Compound Turbomolecular Pumps PAGE 9 TECHNICAL DATA 1. 8 slots 8.4 mm wide 4. Vent port 2. Controller connection 5. Main inlet 3. Backing port 6.
EXT Split Flow Compound Turbomolecular Pumps PAGE 10 TECHNICAL DATA 1. Extended vent-port adaptor 4. 8 slots 8.4 mm wide 2. Backing port 5. Main inlet 3. EXDC controller 6.
EXT Split Flow Compound Turbomolecular Pumps 3 INSTALLATION 3.1 Unpack and inspect PAGE 11 WARNING Take care when you unpack the pump to avoid excessive shocks which could damage the bearings and reduce the life of the pump. The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour. Do not remove these seals until you are ready to install the pump on your vacuum system. Open the top of the packaging by disengaging the cardboard tabs and then opening the lid.
EXT Split Flow Compound Turbomolecular Pumps 3.2 Typical installation PAGE 12 CAUTION Local legislation concerning the impact of the pump on the environment must be followed when installing the pump. INSTALLATION A schematic of a typical vacuum system using a Turbomolecular pump is shown in Figure 5. 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13.
EXT Split Flow Compound Turbomolecular Pumps 3.3 Connection to the vacuum system PAGE 13 WARNING Once the pump is removed from the bottom packaging, there is a danger of toppling. Install the pump in the vacuum system before you connect the controller to the power supply. This will ensure that the pump cannot operate and injure people during installation. WARNING The impeller blades on a Split Flow Pump are very sharp.
EXT Split Flow Compound Turbomolecular Pumps 3.3.2 Inlet-screens (supplied fitted) PAGE 14 WARNING Removal of inlet-screens will expose the risk of injury from sharp edges. INSTALLATION Do not remove the inlet-screens unless you can be sure that there is no danger that debris can fall into the pump. If the screens are removed, the pumping speed through each inlet will increase by approximately 10%. To remove an inlet-screen carefully extract it from the inlet-flange using a bent wire hook.
EXT Split Flow Compound Turbomolecular Pumps Use the BOC Edwards trapped o-ring supplied with the pump and use a minimum of four fixing bolts to connect the inlet-flange of the pump to the vacuum system. M8 bolts should be tightened to a torque of 5-6Nm. PAGE 15 INSTALLATION Figure 7 – Mounting attitude range of an EXT Split Flow Pump 3.3.4 Backing connection WARNING The customer must ensure safe ducting of the backing line if oil mist or hazardous substances are present.
EXT Split Flow Compound Turbomolecular Pumps We recommend that you use a BOC Edwards RV Backing-Pump. The minimum size of the backing- pump required is given in Table 4. You may have to use a larger backing-pump if you run the pump at a high inlet pressure. The EXT70/200H and EXT200/200H Split Flow Pumps are also suitable for use with diaphragm backing-pumps although the effect of higher backing pressure on the pump’s performance and cooling requirements should be noted (see Table 1 and Section 3.6).
EXT Split Flow Compound Turbomolecular Pumps 3.5 Electrical installation PAGE 17 WARNING The customer must ensure that any electrical circuits are protected from dripping water caused by condensation on cold surfaces. It is the responsibility of the customer to ensure that the power supply used is correctly rated/protected. WARNING This product requires a separate power supply (not included). The power supply should be adequately protected against a hazardous live condition (e.g.
EXT Split Flow Compound Turbomolecular Pumps PAGE 18 3.6 Cooling 3.6.1 Introduction CAUTION INSTALLATION You must cool the pump by forced-air or water cooling to prevent damage to the bearing. You must use water-cooling in addition to forced air cooling in any of the following operating conditions: Backing pressure > 10 mbar. Backing pressure > 8 mbar (800 Pa) and interstage flow > 30 sccm (0.5 mbar.ls-1, 50 Pa.ls-1). Backing pressure > 5 mbar (500 Pa) and interstage flow > 80 sccm (1.3 mbar.
EXT Split Flow Compound Turbomolecular Pumps 4 OPERATION PAGE 19 WARNING WARNING Do not move the pump whilst it is running. The gyroscopic forces generated by this movement can cause excessive use of the back-up bearing and may result in catastrophic failure of the pump. WARNING When power is restored following a power cut, the pump will re-start automatically. The pump must remain connected to the vacuum system to prevent risk of injury.
EXT Split Flow Compound Turbomolecular Pumps 4.2 Shut-down PAGE 20 WARNING OPERATION Do not remove the EXDC Controller/EXC Controller cable from the pump until the pump is completely at rest. To do so could expose personnel to hazardous voltage and potentially damage the EXDC/EXC Controller. Note: In an emergency only, open the vent-valve quickly to decelerate the pump rotor in the shortest possible time.
EXT Split Flow Compound Turbomolecular Pumps 5 MAINTENANCE PAGE 21 WARNING WARNING Allow the pump-rotor to stop, then disconnect the controller before you remove the pump from your vacuum system for maintenance or fault-finding procedures. WARNING Do not remove the EXDC Controller/EXC Controller cable from the pump until the pump is completely at rest. To do so could expose personnel to hazardous voltage and potentially damage the EXDC/EXC Controller. 5.
EXT Split Flow Compound Turbomolecular Pumps 5.4 Cleaning the pump PAGE 22 WARNING MAINTENANCE Clean the external surfaces of the EXT Split Flow pumps in a well-ventilated location. When you use cleaning solutions and solvents to clean the pump, observe all precautions specified by the manufacturer. Avoid inhalation of any particulates which may be present in the pump. CAUTION Do not attempt to clean any parts of the EXT Split Flow pumps other than the external surfaces.
EXT Split Flow Compound Turbomolecular Pumps Symptom Check The impeller does not rotate. After Is the EXC Controller power LED lit? pressing start - Fail LED not lit. Action If all of the above are OK then the EXC Controller is faulty. Consult BOC Edwards or your supplier. Is the EXC Controller Start/Stop LED If so, check that the correct links are flashing? made on the EXC Controller logic interface (refer to the instruction manual supplied with the EXC Controller).
EXT Split Flow Compound Turbomolecular Pumps Symptom PAGE 24 MAINTENANCE The EXC Controller trips into Fail after 50% speed has been reached the first two speed LEDs are lit. Check Action Is the timer set incorrectly? Increase the timer setting (refer to the instruction manual supplied with the EXC Controller). If the EXC Controller still trips into Fail consult BOC Edwards or your supplier. Is the pressure too high? If so, reduce the pumping load or check for a gross leak into the system.
EXT Split Flow Compound Turbomolecular Pumps Symptom Check The EXT Split Flow Pump is very noisy Is the pump rotational speed the same or there is excessive vibration or both. as the resonant frequency of the attached system? If so, change the natural frequency of your system. Is the vibration being transmitted from the rotary pump? If so, fit flexible bellows or a vibration isolator in the backing line. Is the noise irregular and getting progressively worse? If so, a bearing is defective.
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EXT Split Flow Compound Turbomolecular Pumps 6 STORAGE AND DISPOSAL 6.1 Storage PAGE 27 Use the following procedure to store the pump. Place protective covers over the main inlet, side inlet, outlet, interstage (Hi variants only) and vent ports. 2. Place the pump in its packing materials. For fastest pump-down when the pump is put back into service, seal the pump inside a plastic bag together with a suitable desiccant. 3. Store the pump in cool, dry conditions until required for use.
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EXT Split Flow Compound Turbomolecular Pumps 7 SERVICE, SPARES AND ACCESSORIES 7.1 Introduction PAGE 29 Order spare parts and accessories from your nearest BOC Edwards company or distributor. When you order, please state for each part required: 7.2 • Model and item number of your equipment. • Serial number (if any). • Item number and description of the part. Service BOC Edwards products are supported by a worldwide network of BOC Edwards Service Centres.
EXT Split Flow Compound Turbomolecular Pumps 7.3.3 Inlet-flange seals EXT Split Flow Pumps are supplied with inlet seals. The Item Numbers of replacement seals are given below. PAGE 30 SERVICE, SPARES AND ACCESSORIES Flange size Inlet-flange seal Item Number DN100ISO-K ISO100 trapped o-ring, fluoroelastomer B271-58-171 DN63ISO-K ISO63 trapped o-ring, fluoroelastomer B271-58-170 Table 10 - Inlet-flange seals 7.4 Accessories 7.4.
EXT Split Flow Compound Turbomolecular Pumps 7.4.4 Pump-to-controller cables You must fit a pump-to-controller cable between an EXC Controller and the EXT Split Flow Pump. A cable is not supplied with the EXT Split Flow Pump or the EXC Controller (except EXC100L). The following cables are available: Length Item Number Pump-to-controller 1m D396-18-010 Pump-to-controller 3m D396-18-030 Pump-to-controller 5m D396-18-050 Table 13 - Pump-to-controller cable 7.4.
EXT Split Flow Compound Turbomolecular Pumps 7.4.8 VRX Vent-restrictor Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT Split Flow Pump. Refer to Section 3.4 for information on the selection of the correct VRX Vent-restrictor. PAGE 32 SERVICE, SPARES AND ACCESSORIES Vent-restrictor Orifice diameter Item Number VRX10 VRX20 VRX30 VRX50 VRX70 0.1 mm 0.2 mm 0.3 mm 0.5 mm 0.
INDEX A Mechanical fixing . . . . . . . . . . . . . . . . . . . . . . . . . . 13 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 ACX air-cooler . . . . . . . . . . . . . . . . . . . . . . . . . . 31 P B Pumping media . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Pump-to-controller cables . . . . . . . . . . . . . . . . . . 31 Backing connection . . . . . . . . . . . . . . . . . . . . . . . 15 Bearing maintenance . . . . . . . . . . . . . . . . . . . . . .
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