Instruction manual

7.5 Detector Validation
7-19
RF-20A/20Axs
7
[EM CHECK]
[EX CHECK]
• If there is an abnormality:
The screen to the right appears.
^ "6.2 Dealing with Error Messages" P.6-5
[EM CHECK]
12
Press several times.
The initial screen is redisplayed.
EM CHECK
EmDif507: 0.1nm
EM CHECK
CHECK GOOD
EM CHECK
EmDif254: 0.3nm
EX CHECK
CHECK NG1
EM CHECK
CHECK NG1