Operation Manual

FCC ID : OPO199909010001

KEN72-3699(E)Rev.0

3.3 safety consideration

3.3.1 EMO ( Emergency Power OFF) on Power Supply Panel

EMO switch is installed on the front surface of Power Supply Panel. By pressing this button,

power supply to all the vehicle in that system (generally in the bay) will be suddenly stopped

and all the vehicles will be suddenly stopped (stopped within three seconds at worst).

Same function EMO switches can be added to the system optionally. Shinko will supply the

predetermined quantity of EMO switches and the installation (fixing in adequate position) in the

bay shall be done by customer.

(Remarks)

Fixing position of EMO switch shall be decided by customer considering the FAB operation.

According the SEMI S8 and other standards, the EMO position shall be between 81 cm to 165

cm in height if the operators are standing position in work.

3.3.2 P I/O interlock with manufacturing tool

Shinko system is fully compliant with SEMI E84 in P I/O hand shaking. If ES (Emergency Stop)

signal from passive side (manufacturing tool) is activated, hoisting movement of the

corresponding vehicle will be suddenly stopped.

3.3.3 Estop(Emergency Stop) on Vehicle

Estop button is installed on each vehicle. By pushing this button, vehicle movement (traveling

and hoisting gripping) will be suddenly stopped.

3.3.4 Look forward sensor (Envelope sensor)

There are many kinds of sensors in front of the Vehicle. These sensors are collision avoidance

sensor, front vehicle detection sensor, approaching sensor, invasion prohibit sensor.

Collision detection sensors detect the obstacles and vehicle exist in front of the vehicle .

These sensors detect the object in 2 stale (Long range and short range).

Long range output is settled to detect about the distance in 3000mm. If it activated, the vehicle

changes the speed to middle speed.

Short range output is settled to detect about the distance in 1500mm . when all the short range

sensor are activated, and the front vehicle detection sensor is detecting, then the vehicle

changes to creep speed. Otherwise Vehicle will stop.

Approaching sensor is settled to detect the object in distance of 150-200mm. If this sensor

detect, the vehicle will stop.

3.3.5 Fall protection arm

Each vehicle has fall protection arms, which tries to protect the FOUP in vehicle and traveling

position falling in the case of FOUP breakage.