Operation Manual

FCC ID : OPO199909010001
KEN72-3699(E)Rev.0
21
4.Specification
4.1General Specification
4.1.1. Transport carrier
(1) Name : 300mm wafer FOUP
(2) Type :
(3) Manufacturer :
(4) Material : Compliant with SEMI E47.1-0299 (1999)
(5) Color : Compliant with SEMI E47.1-0299 (1999)
(6) Weight : 8.7 kgf (Max., including 25 wafers)
(7) Dimension : 430mm (W) x 356 mm (L) x 338 mm (H)
(8) Outline shape : Compliant with SEMI E47.1-0299 (1999)
4.1.2 Transport unit
(1) 1 FOUP / 1 vehicle
4.1.3 Environment condition
(1) Cleanliness : Class 100 (0.2 um)
(2) Temperature : 23 Degrees Celsius
(3) Humidity : %
(4) Corrosive gas : Nil
(5) Floor surface : Punching plate
(6) Ceiling Material : ULPA filter
(7) Ceiling height : 12 feet
(8) Required strength of the ceiling height
Refer to YDM-12075 for Customer specific condition.