Operation Manual

FCC ID : OPO199909010001

KEN72-3699(E)Rev.0

1.General

1.1 Application

This document describes the operation of OHT Vehicle for “SELOHT SOHT-300”, Shinko

OHT(Overhead Hoist Transport) System.

1.2 Related SEMI document

Following documents are parts of the specification:

(1) SEMI E10-0299 (1999) (RAM)

(2) SEMI E15.1-0299 (1999) (LOAD PORT)

(3) SEMI E30-0998 (1998) (GEM)

(4) SEMI Draft 2998 (Future E82-0999 (1999), IBSEM)

(5) SEMI E37.1-96 (1996) (HSMS-SS)

(6) SEMI E47.1-0299 (1999) (FOUP)

(7) SEMI E84-0699 (1999) (Extended P I/O)

1.3 Related Rules, Laws

(1) FCC Part15 Subpart C

(2) FCC Part 18

1.4 Abbreviations

(1) OHT : Overhead Hoist Transport

(2) OHV : Overhead Hoist transport Vehicle

(3) OHVC : Overhead Hoist Vehicle Controller

(4) CMC : Communication Modem Controller