Instruments, Inc. Thin Film Deposition Controller 's User's Guide SQC-122c

Chapter 3 Menus
3-12
The material to be deposited is the most significant film parameter. However, a film
definition also includes the setup parameters shown below:
I Term
Sensor 1
Sensor 2
Output
Pocket
Max Power
Slew Rate
Crystal Quality Disabled
10.0
76.0
1
Out1
On
On
0.7
%
%
Out1/Out2
On/Off
On/Off
Sec.
RATE(A/s)
0.0
Film Edit Menu
Film
Conds.
Deposit
Controls
Exit to
Main
Prev
Menu
Edit
THICKNESS(kA)
0.000
POWER(
%)
0.0
My Process 1 Editing: Aluminum
Parameter
Value
Units
P Term 50 None
D Term 0.0
Sec.
Film Tooling
100
%
Exit to Main
Returns to the Main Menu.
Prev
Menu
Returns to the Film Select Menu.
Edit
Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel:
Stop editing and
undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Film Conds.
Displays pre/post conditioning settings (See 2.6).
Deposit Controls
Displays deposition control settings (See 2.2).
Control Knob
Scrolls through the list of film parameters.