Specifications

Electronic Pressure Control (EPC) Module, Continued
The following specifications are applicable to the Electronic Pressure
Control Module (EPC):
Specifications
Topic Specification
Maximum inlet pressure 120 psig
Pressure output range 5-100 psig
Minimum differential between EPC
inlet and outlet
5 psi
Flow range from EPC 5-500 sccm
(see note below)
Controlled pressure stability over
temperature range
+/-0.5% of setpoint
Short-term pressure stability +/-0.0005 psi over 30 seconds
Typical response time for step
change in setpoint.
Stable to within 0.1% of final value
within 0.5 seconds*
* (For hydrogen the response time is
~ 1 second).
Note: When running applications with column flow rates of less than
5 sccm, a separate bleed flow path is recommended in order to reduce
the time required to achieve pressure stability when variable setpoints
are used. Depending on the volume involved, a bleed flow rate of 5-10
sccm is recommended.
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