Varian, Inc. Vacuum Technologies Turbo-V Pumps Features and Benefits 154-155 Typical Applications 156-159 Pump Models 160-179 Pump Controllers 180-185 Accessories 186-187 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem.
Turbo-V Pump Features and Benefits Wide Pumping Speed Range: 70 to 6,000 l/s Varian offers a complete range of turbomolecular pumps, to cover all possible applications and market segments. Very High Foreline Tolerance Working with a foreline pressure as high as 18 mbar yields a substantial advantage: the size of the primary pump can be significantly reduced such that even a backing pump as small as the 5 m3/hr SH-100 (dry) or DS 102 can be used to operate our V 301 Navigator in all its pumping profiles.
Turbo-V Pumps State-of-the-Art MacroTorr® Technology The most effective pumping stage technology currently available. Thanks to this powerful Varian innovation you can: - maximize the throughput of the pump - extend the foreline tolerance up to 18 mbar - increase the compression ratio by decades, most notably for light gases without compromising the size or weight of the pump. In fact, the MacroTorr® stages set in the V301 Navigator is hosted in the space of one inch.
Turbo-V Pump Typical Applications Semiconductors The turbo pump is the critical element in the creation of an appropriate environment in the world of semiconductor manufacturing. In fact, as semiconductor chip geometries continue to shrink, the reliance on turbo pump technology is the highest it has been in the history of semiconductor manufacturing. Varian’s turbo pumps provide unique and critical advantages in the creation of vacuum for the manufacture of semiconductor devices.
Turbo-V Pumps system design in the most stringent space requirements. MacroTorr® Turbo Pumps can operate at higher foreline pressures, allowing the use of diaphragm roughing pumps, thus providing a completely clean, oil-free compact and cost effective pumping package. Whenever a large amount of gas has to be pumped and higher throughput is needed, the combination of Turbo-V pumps and TriScroll® dry pumps is the state-of-the-art solution.
Turbo-V Pump Typical Applications Mass Spectrometry Mass Spectrometry has become an important analytical tool in many industries including pharmaceuticals. Thanks to advances in electronics, instrument designers can implement cost-effective, high-performance analytical power in a cost-effective, easy-to-use system. These developments require advanced vacuum systems that are characterized by multi-chamber, high throughput designs on the high quality instruments.
Turbo Pumps Turbo-V Pumps Device Processing: • TV & Monitor picture tube manufacture • Evacuation of lamps (motorway lighting, beamers) • X-Ray tubes & electron devices • Medical accelerator tubes • Lasers General Industrial Processes: • Vacuum furnaces / metallurgy • Others Industrial Thin Film Deposition Equipment Our expertise with both OEMs and end users in the field of industrial vacuum equipment makes us the right partner for your Total Vacuum Solution.
Pump Models Turbo-V 81 M Turbo-V 81 T Turbo-V 301 Navigator Pump Specification DN 40 DN 63 DN 40 DN 63 DN 100 DN 160 Pumping Speed, l/s Nitrogen Helium Hydrogen 50 56 46 77 65 50 50 56 46 77 65 50 250 220 200 280 230 210 Compression Ratio Nitrogen Helium Hydrogen 5 x 108 8 x 104 7 x 103 5 x 108 8 x 104 7 x 103 7 x 108 3 x 103 3 x 102 7 x 108 3 x 103 3 x 102 7 x 108 1 x 105 1 x 104 7 x 108 1 x 105 1 x 104 Base pressure, mbar with recommended mechanical pump with recommended dry pump
Turbo-V 551 Navigator Turbo-V 3K-T System Turbo-V 2K-G System DN 100 DN 160 Turbo-V 701 Navigator DN 200 DN 160 Turbo-V 1001 Navigator DN 200 DN 250 DN 250 DN 250 350 450 450 550 600 510 690 620 510 790 820 860 950 870 900 1,050 900 920 2,050 2,400 2,300 1,600 > 1 x 109 1 x 107 1 x 106 > 1 x 109 1 x 107 1 x 106 1 x 109 1 x 107 1 x 106 1 x 109 1 x 107 1 x 106 1 x 109 1 x 107 1 x 106 1 x 109 1 x 107 1 x 106 1 x 109 1.2 x 105 1.
Turbo-V 81-M Outline Drawings VIEW FROM A Ø 91.5 (3.60) 58.5 (2.13) 12 (0.47) Ø 113.5 (4.47) Ø 69.3 (2.73) Ø 80 (3.15) KF 40 CFF 2.75 CFF 4.5 25.5 (1.00) 144.5 (5.69) 50.1 (1.97) 37.5 (1.48) 161.8 (6.37) 32 (1.26) 163.5 (6.44) Ø 92 (3.62) 64.5 (2.54) 80.5 (3.17) 144.6 (5.69) ISO 63 Ø 80 (3.15) 17.5 (0.69) Ø 80 (3.15) Ø 80 (3.15) Ø 55 (2.17) 17.3 (0.68) Ø 94.9 (3.74) 25 (0.98) 60.5 (2.38) 84 (3.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 63 only) Compression Ratio vs Foreline Pressure 1010 90 70 Compression ratio Pumping speed (l/s) 80 60 50 40 30 20 108 106 104 102 10 0 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 1 10 10-3 Argon 10-1 1 10 100 Foreline pressure (mbar) Inlet pressure (mbar) Nitrogen 10-2 Helium Argon Nitrogen Helium Hydrogen Description Pumps Turbo-V 81-M pump with ISO 63 inlet flange Turbo-V 81-M pump with CF 4 1⁄2” inlet flange Turbo-V 81-M pump
Turbo-V 81-T Outline Drawings VIEW FROM A Ø 91.5 (3.60) 37.5 (1.48) CFF 2.75 CFF 4.5 145.8 (5.74) 128.6 (5.06) 32 (1.26) 147.5 (5.81) 12 (0.47) 64 (2.52) Ø 80 (3.15) Ø 80 (3.15) Ø 69.3 (2.73) KF 40 ISO 63 Ø 92 (3.62) 128.7 (5.07) 80 (3.15) Ø 113.5 (4.47) 17.5 (0.69) Ø 80 (3.15) Ø 80 (3.15) Ø 55 (2.17) 73 (2.87) Ø 94.9 (3.74) 17.3 (0.68) 58.5 (2.13) 25 (0.98) 60.5 (2.38) 84 (3.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 63 only) Compression Ratio vs Foreline Pressure 1010 90 70 Compression ratio Pumping speed (l/s) 80 60 50 40 30 20 108 106 104 102 10 0 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 1 10 10-3 10-2 Inlet pressure (mbar) Nitrogen Argon 10-1 1 10 Foreline pressure (mbar) Nitrogen Helium Helium Hydrogen Description Weight kg (Ibs) Part Number Pumps Turbo-V 81-T pump with ISO 63 inlet flange Turbo-V 81-T pump with CF 4 1⁄2” inlet flange
Turbo-V 301 Navigator 2 Turbo-V 301 pumps are in the 500-MS Outline Drawings Ø 180.0 (7.1) Ø 202.4 (8.0) ISO 160 241.0 (9.5) 21.6 (0.9) Ø 120.0 (4.7) 177.0 (7.0) Ø115.1 (4.5) 44.7 (1.8) 174.0 (6.9) 238.0 (9.4) CFF 8’’ 24V CONTROLLER FRONT PANEL 120/220V CONTROLLER FRONT PANEL Ø151.6 (6.0) CFF 6’’ Ø130.0 (5.1) ISO 100 20’0’ Ø144.0 (5.7) WATER COOLING 1/8 GAS 85.1 (3.4) 106.9 (4.2) 86.4 (3.4) 106.9 (4.2) 63’0’ 64.0 (2.5) 84.6 (3.3) 21.6 (0.9) Ø116.1 (4.6) 47.0 (1.9) 47.2 (1.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 160 only) Compression Ratio vs Foreline Pressure 1010 350 Compression ratio Pumping speed (l/s) 300 250 200 150 100 108 106 104 102 50 0 10-10 10-5 10-4 10-3 10-2 10-1 1 10 1 10-2 10-1 Helium 10 100 Foreline pressure (mbar) Inlet pressure (mbar) Nitrogen 1 Nitrogen Hydrogen Helium Hydrogen Weight kg (Ibs) Part Number Complete Systems (Pump + Navigator Controller) Turbo-V 301 Navigator complete system, ISO 100, 24 Vdc Turbo-V 3
Turbo-V 551 Navigator Outline Drawings A Ø151.6 (6.0) VIEW FROM "A" CFF 6" 157.1 (6.2) = 12°0' 13.2 (0.5) = Ø114.0 (4.5) VENT PORT MoniTorr PORT 130.8 (5.1) 70.0 (2.8) (WATER COOLING) 200.6 (7.9) 203.7 (8.0) 334.3 (13.2) 11.6 (0.5) 146.5 (5.8) (WATER COOLING) 126.0 (5.0) 325.8 (12.8) 109.8 (4.3) CFF 8" Ø164.0 (6.5) Ø163.4 (6.4) PURGE PORT 166.0 (6.5) Ø202.4 (8.0) ISO 160 11.3 (0.4) Ø180.0 (7.1) FORELINE KF 25 343.8 (13.5) 229.1 (9.0) Ø115.0 (4.5) ELBOW 90° ELECT.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 160 only) Compression Ratio vs Foreline Pressure 1010 700 108 500 Compression ratio Pumping speed (l/s) 600 400 300 200 106 104 102 100 1 0 10-10 10-5 10-4 10-3 10-2 10-1 1 10-2 10 10-1 Nitrogen Helium 1 10 100 Foreline pressure (mbar) Inlet pressure (mbar) Nitrogen Hydrogen Helium Hydrogen Description Complete Systems Turbo-V 551 Navigator complete system, ISO 160 flange Turbo-V 551 Navigator complete system, ISO 160-F bolted
Turbo-V 701 Navigator Outline Drawings A CFF 10" 196.1 (7.7) WATER COOLING 1/8 G 46.0 (1.8) VENT PORT 314.8 (12.4) 229.1(9.0) 130.8 (5.1) 115.1 (4.5) VIEW FROM "A" 157.1 (6.2) = 12°0' = 253.2 (10.0) WATER COOLING 1/8 G ELBOW 90° ELECT. CONNECTOR 70.0 (2.8) (WATER COOLING) 200.6 (7.9) Ø240.0 (9.5) Ø224.0 (8.8) ISO 200 166.0 (6.5) FORELINE KF 25 324.9 (12.8) Ø203.7 (8.0) PURGE PORT 146.5 (5.8) 126.0 (5.0) (WATER COOLING) 109.7 (4.3) VIEW FROM "B" B ISO 200-F 324.7 (12.8) Ø285.0 (11.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 200 only) Compression Ratio vs Foreline Pressure 1010 700 Compression ratio Pumping speed (l/s) 600 500 400 300 200 108 106 104 102 100 0 1 10-10 10-5 10-4 10-3 10-2 10-1 1 10 10-2 10-1 Nitrogen Helium 1 10 100 Foreline pressure (mbar) Inlet pressure (mbar) Nitrogen Hydrogen Helium Hydrogen Description Weight kg (Ibs) Part Number 19.0 (43.0) 25.0 (56.0) 25.0 (56.
Turbo-V 1001 Navigator Outline Drawings ISO 160 10 158.1 (6.17) 294.3 (11.48) 2° 0' ISO 250 ISO 200 VENT ELEC. CONNECTOR 10 2° 0' 279.4 (10.90) 52.0 (2.03) 158.1 (6.17) 252.8 (9.86) Ø232.0 (9.13) WATER COOLING WATER COOLING CFF 10" VENT 52.0 (2.03) WATER COOLING WATER COOLING 70.0 (2.73) 122.8 (4.79) 322.7 (12.58) 228.5 (8.91) 10 2° 0' ELEC. CONNECTOR 200.6 (7.82) Ø232.0 (9.13) ISO 200-F 350.6 (13.80) 323.5 (12.74) Ø285.0 (11.22) Ø335.0 (13.19) ISO 250-F Ø232.0 (9.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 250 only) Compression Ratio vs Foreline Pressure 1010 1200 Compression ratio Pumping speed (l/s) 1000 800 600 400 200 0 108 106 104 102 1 10-10 10-5 10-4 10-3 10-2 10-1 1 10 10-2 10-1 Inlet pressure (mbar) Nitrogen Helium 1 10 100 Foreline pressure (mbar) Nitrogen Hydrogen Helium Hydrogen Description Complete Systems Turbo-V 1001 Navigator complete system, ISO 160 flange Turbo-V 1001 Navigator complete system, ISO 200 flange Turbo-
Turbo-V 3K-T System Outline Drawings BOTTOM VIEW ISO 250F AND CFF 12" FORELINE 30° 60° VENT 40 5 (1. 7) INLET SCREEN WITH CENTER-RING CFF 12" 182.5 (7.18) 217 (8.54) 146 (5.75) Turbo-V 3K-T 413 (16.26) Ø 306 (12.05) 105 (4.35) 124.2 (4.89) 262 (10.31) 16 (0.63) VENT Turbo-V 3K-T 385 (15.16) ISO 250F Ø 334.9 (13.
Turbo-V Pumps Compression Ratio vs Foreline Pressure 2500 1010 2000 108 Compression ratio Pumping speed (l/s) Pumping Speed vs Inlet Pressure (*) 1500 1000 500 0 10-7 106 104 102 0 10-6 10-5 10-4 10-3 10-2 10-1 1 10 10-3 10-2 Nitrogen 1 10 Foreline pressure (mbar) Inlet pressure (mbar) Helium 10-1 Nitrogen Argon Helium Hydrogen (*) Measured with a 60 m3/h forepump.
Turbo-V 6000 Outline Drawings ISO 500 Ø 550 (21.65) 300 (11.81) 786 (30.94) ISO 500 Ø 556 (21.89) Ø 606.3 (23.87) KF 10 Vent port 60° 58 (2.28) .31) 20° 60° 20° 358 (14.09) 303 (11.93) 8 (0 ISO 100 87 (3.42) Ø 620 (24.41) 19 (0.75) 315 (12.4) 760 (29.92) 513 (20.19) Foreline port M12 7) 7.6 5( 19 Ø 240 (9.
Turbo-V Pumps Pumping Speed vs Inlet Pressure (DN 500 only) Compression Ratio vs Foreline Pressure 1010 7800 108 Compression ratio Pumping speed (l/s) 6500 5200 3900 2600 1300 0 10-10 106 104 102 1 10-5 10-4 10-3 10-2 10-1 1 10 10-4 10-3 Helium 10-1 1 Foreline pressure (mbar) Inlet pressure (mbar) Nitrogen 10-2 Nitrogen Hydrogen Helium Hydrogen Description Weight kg (Ibs) Part Number 282.0 (620.
Turbo-V 2K-G System Outline Drawings 45° ) 56 (1. 40 INLET SCREEN WITH CENTER-RING 30° FLANGE ISO 250F CONTROLLER FRONT PANEL 245 (9.56) 146 (5.69) 95 (3.71) PURGE & VENT SWAGELOCK PIPE 1/8 124,1 (4.84) EYEBOLT 335 (13.07) 298 (11.62) 261 (10.3) FORELINE KF 40 WATER COOLING FOR RUBBER TUBE DIA 9.0 4) .3 (7 Ø 335 (13.07) 2 8, 18 Ø 11 (0.43) N° 12 Ø 310 (12.
Turbo-V Pumps Pumping Speed vs Inlet Pressure Compression Ratio vs Foreline Pressure 1000000 1800 100000 1400 Compression ratio Pumping speed (l/s) 1600 1200 1000 800 600 400 10-6 1000 100 10 200 0 10000 10-5 10-4 10-3 10-2 10-1 1 1 10-2 10-1 1 10 Outlet pressure (mbar) Inlet pressure (mbar) Nitrogen 10-3 Argon Nitrogen Argon Ordering Information Part Number 9698871 9698873 9699958 9699957 9699883 9699260 RASS2KG_1YR RASS2KG_2YR 9699138 9699348 9699338 Turbo Pumps Description
Turbo-V 81-AG Rack Controller 9.4 (0.37) Outline Drawings 106.4 (4.19) 128.5 (5.06) 122.5 (4.82) = 8.5 (0.33) 110.6 (4.35) = 91.4 (3.60) = = Turbo-V 81-AG 1.5 (0.06) 96.1 (3.78) 244 (9.61) Dimensions: millimeters (inches) The Turbo-V 81-AG Rack controller is a microprocessorcontrolled frequency converter with new, enhanced features that allow greater control and communication capabilities.
Turbo-V Pumps Turbo-V 301 Navigator Controller Outline Drawings 24 V controller front panel 120/220 V controller front panel MAINS FUSE TYPE T 8A MAINS FUSE TYPE T 3A LD1 STATUS P5 FAN LD1 STATUS J6 SERIAL P3 VENT J5 IN-OUT P5 FAN J6 SERIAL J5 IN-OUT 107.0 (4.2) = = P3 VENT 107.0 (4.2) = = Dimensions: millimeters (inches) They can be mounted on board, either on the bottom or on the side of the pump, offering outstanding flexibility and simplicity.
Turbo-V 301-AG Rack Controller 9.4 (0.37) Outline Drawings 106.4 (4.19) 128.5 (5.06) 122.5 (4.82) = 8.5 (0.33) 110.6 (4.35) = 91.4 (3.60) = = Turbo-V 301-AG 1.5 (0.06) 96.1 (3.78) 244 (9.61) Dimensions: millimeters (inches) The Turbo-V 301-AG Rack controller is a microprocessorcontrolled frequency converter with new, enhanced features that allow greater control and communication capabilities.
Turbo-V Pumps Turbo-V 551, 701 and 1001 Navigator Controllers Outline Drawings FUSE TYPE T XXA MP LD1 STATUS P3 VENT P4 FAN J2 SERIAL J1 IN-OUT Ø 200.6 (7.88) 201.7 (7.94) 70.0 (2.76) The Turbo-V 551, 701 and 1001 Navigator controllers are microprocessor-controlled frequency converters, fully controllable through PC software, with self-diagnostic and protection features that ensure the highest degree of reliability.
Turbo-V 550, 700HT and 1000HT Rack Controllers Outline Drawings 212 (8.34) 127.5 (5.02) 198.1 (7.8) CYCLE NUMBER CYCLE TIME PUMP LIFE 2.5 (0.01) LOW SPEED PUMP CURRENT TEMPERATURE POWER START STOP RESET 280 (11.02) (*) 255 (10.03) (*) These controllers are microprocessor-controlled frequency converters with self diagnostic and protection features that ensure the highest degree of reliability.
Turbo-V Pumps Turbo-V 6000 Rack Controller Outline Drawings CYCLE NUMBER CYCLE TIME PUMP LIFE PUMP CURRENT TEMPERATURE POWER LOW SPEED START STOP RESET 132 (5.20) 123 (4.84) 30 (1.18) 14 (0.55) 293 (11.54) Turbo-V 6000 443 (17.44) 482 (18.98) The Turbo-V 6000 controller is a 19” rack mountable unit. This controller provides the following features: System Diagnostics Front panel LED bar graph displays the controller output frequency and the power drawn by the pump.
Turbo-V Accessories Inlet Screens To prevent any possible damage to the pump blades caused by particles falling into the pump, an inlet screen is available as an accessory. The inlet screen is a curved stainless steel mesh. It provides protection against debris larger than 0.7 to 3 mm (depending on the model), while reducing the pumping speed by only about 10%. For ordering information, see individual pumps. They are available up to a size of 200 mm (ISO 200 or CF 10” O.D.).
Turbo-V Pumps Handheld Terminal The handheld terminal is a remote control display for use with V 81 series Turbo-V pumps when connected to a controller without a front panel. It consists of an LCD alphanumeric display and keyboard which provide useful real time indications of the operating conditions and parameters of the turbopump. Moreover, it allows the reprogramming of the controller parameters and troubleshooting of the pump and controller.
The Varian Turbo-V Pumps Enjoying the Varian Turbo Experience… Just imagine 1,333 turns in one second: this is the extraordinary rotational speed of our 80 l/s turbomolecular pump. Isn’t it amazing? Consider that when you are driving on an open highway, the wheels of your car make about 15 turns every second.
Turbo-V Pumps Last but not least, the MoniTorr System, our intelligent turbopump autodiagnostic system, that continuously monitors the pump’s operating parameters and informs the service personnel about the state of the pump, ensuring maximum vacuum system uptime. Part of our success is due to our Applications based structure. Everything in our organization reflects the will to meet customer needs.
Turbo-V Pump Technical Notes Turbopump Operating Principles Turbomolecular pumps consist of a series of bladed impellers rotating at high speed and fixed bladed stators. These impellers and stators are alternately spaced and are inclined in opposite directions. The pumping action is based on momentum transfer from the fast moving impeller surface to the gas molecules.
Turbo-V Pumps The pumping speed of the backing pump should be the higher of the two values calculated as above (roughing and backing). Finally, it is possible to use a dry pump (scroll or diaphragm) for hydrocarbon-free operation when pumps of the MacroTorr® type are used. Turbomolecular Pump Parameters and Definitions Throughput “Throughput” is the flow rate of pumped gas through the turbomolecular pump (and foreline pump). Throughput (Q) is measured in mbar l/s ≅ 1/60 standard cm3/min.
Turbo-V Pump Technical Notes Seff reaches its maximun value “S” (nominal pumping speed) when “Rp” equals unity, and it is zero when the pressure ratio Rp has reached its maximum value “K”.
Turbo-V Pumps Typical Competitor Pump 10-8 H2 O 10-9 H2 P (Torr) Operation in Presence of Magnetic Fields CO2 O2 10-11 10-12 CF2 1 6 C3 F CF3 C5 F 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 a.m.u. Figure 5 Typical Varian Pump 10-9 H2 O P (Torr) Magnetic fields induce eddy currents in the turbomolecular pump rotor that tend to oppose its rotation. As a consequence the power delivered to the electrical motor is increased.
Turbo-V Pump Technical Notes Another feature of the Turbo-V bearing system is its proprietary lubricant which has an extremely low vapor pressure and is virtually hydrocarbon free. The use of this lubricant in the permanently sealed bearing system ensures clean, reliable operation without the need for any maintenance whatsoever.
Turbo Pumps Turbo-V Pumps Varian, Inc.
Turbo Pump Service and Support Plan Varian Vacuum Technologies offers one of the most comprehensive service and support plans in the industry. As a worldwide, first class company we strive to offer added value to our Customers wherever they may be located. Excellence in Service and Support is a key factor in added value. Support can be accomplished with qualified Engineers and an appropriate logistic infrastructure.
Turbo-V Pumps In addition, the Upgrade Program provides - Proactive Technical Installation Support, by telephone - Full 12-month warranty The Upgrade Program is available for our standard products. Owners of OEM or custom products are requested to contact Varian Technical Support at: 00-800-234-234-00 (Europe Toll free) or send e-mail to: vtt.technical.support@varianinc.
Turbo Pump Service and Support Plan Uptime Services • Remote Diagnostics Varian’s Remote Assist Agreements are specifically designed to provide first class support in monitoring your Varian Turbo Pumps to properly perform preventive maintenance activities. Remote Assist are aimed at preventing unexpected turbo pump failures. Prevention can be made with Varian remote assistance.
Turbo-V Pumps Technical Assistance Americas North America: Tel. 1.800.882.7426 (toll-free) Tel. 1.800.8VARIAN (toll-free) Fax (1) 781.860.5465 Central and South America: Tel. (1) 781.861.7200 Fax (1) 781.860.5465 Asia Japan: Tel. 0120-655-040 (toll-free) Fax (81) 3.5232.1263 (dedicated line) Korea: Tel. 080.222.2452 (toll-free) Fax (82) 2.3452.2451 (dedicated line) Taiwan: Tel. 0800-051342 (toll-free) Fax (886) 2.2698.9678 (dedicated line) China: Tel. 800.820.6556 (toll-free) Fax (86) 21.6375.
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