Specifications

Turbo-V 81-M
162
Ø 69.3 (2.73)
Ø 80 (3.15) Ø 113.5 (4.47)
Ø 80 (3.15)
64.5 (2.54)
80.5 (3.17) 12 (0.47)
144.6 (5.69)
17.3 (0.68)
161.8 (6.37)
Ø 80 (3.15)
Ø 94.9 (3.74) Ø 80 (3.15)
Ø 92 (3.62)
ISO 63 CFF 2.75 CFF 4.5KF 40
Ø 55 (2.17)
60.5 (2.38) 58.5 (2.13)
84 (3.31)
37.5 (1.48)
32 (1.26)
163.5 (6.44)
25 (0.98)
Ø 91.5 (3.60)
A
50.1 (1.97)
25.5 (1.00)
144.5 (5.69)
17.5 (0.69)
VIEW FROM A
Dimensions: millimeters (inches)
Outline Drawings
Technical Specifications
Pumping speed (l/s)
With CF 4
1
⁄
2
” or ISO 63: N
2
: 77 l/s He: 65 l/s H
2
: 50 l/s
With CF 2
3
⁄
4
” or KF 40: N
2
: 50 l/s He: 56 l/s H
2
: 46 l/s
Compression ratio N
2
: 5 x 10
8
He: 8 x 10
4
H
2
: 7 x 10
3
Base pressure* (with recommended forepump) 5 x 10
-10
mbar (3.8 x 10
-10
Torr)
Inlet flange CF 4
1
⁄
2
” O.D. ISO 63
CF 2
3
⁄
4
” O.D. KF 40
Foreline flange KF 16 NW
Rotational speed 1350 Hz (max)
Start-up time < 60 seconds
Recommended forepump Mechanical: Varian DS 42 – DS 102
Dry pump: Varian SH 100
Operating position Any
Cooling requirements Natural air convection
Forced air or water optional
Bakeout temperature 120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
Vibration level (displacement) <0.01 µm at inlet flange
Weight kg (lbs) ISO 63: 2 (4.4)
CF 4
1
⁄
2
”: 2,98 (6.57)
* According to standard DIN 28 428.