Specifications

Turbo-V Pumps
163
Varian, Inc. Vacuum Technologies
Turbo
Pumps
Inlet pressure (mbar)
90
0
10
-9
10
-7
10
-6
10
-2
10
Pumping speed (l/s)
110
-8
10
-5
10
-4
10
-3
10
-1
80
70
60
50
30
40
20
10
Pumping Speed vs Inlet Pressure (DN 63 only)
Foreline pressure (mbar)
1
10
-3
10
-2
Compression ratio
10
-1
110
10
2
10
4
10
6
10
8
10
10
100
Compression Ratio vs Foreline Pressure
Description Weight kg (Ibs) Part Number
Pumps
Turbo-V 81-M pump with ISO 63 inlet flange 2.0 (4.4) 9698901
Turbo-V 81-M pump with CF 4
1
⁄
2
” inlet flange 2.98 (6.57) 9698903
Turbo-V 81-M pump with KF 40 inlet flange 2.0 (4.4) 9698902
Turbo-V 81-M pump with CF 2
3
⁄
4
” inlet flange 2.98 (6.57) 9698904
Controllers
Rack controller 81-AG base 1.7 (3.2) 9698988
Rack controller 81-AG RS232/485 1.7 (3.2) 9698989
Rack controller 81-AG Profibus 1.7 (3.2) 9698990
PCB 24 V 1.0 (2.2) 9699538
Accessories
Inlet screen, DN 40 0.5 (1.0) 9699309
Inlet screen, DN 63 0.5 (1.0) 9699300
Heater band 220 V 1.0 (2.2) 9699801
Heater band 120 V 1.0 (2.2) 9699802
Metallic water cooling kit 0.5 (1.0) 9699823
Plastic water cooling kit 0.5 (1.0) 9699824
Air cooling kit (0.5 m cable) 2.2 (5.0) 9699290
Air cooling kit extension cable (5 m) 2.2 (5.0) 9699940
Pump extension cable 2.2 (5.0) 9699942
Vibration damper DN 63 0.5 (1.0) 9699340
Vibration damper CFF 4.5" 0.5 (1.0) 969-9376
Mechanical pump DS 102 22.0 (48.0) 9499315
Mechanical pump DS 42 11.0 (24.0) 9499309
Dry scroll SH 110 19.0 (43.0) SH01101 UNIV
Ordering Information
Nitrogen
Helium Hydrogen
Nitrogen
Argon ArgonHelium