Specifications

Turbo-V 81-T
164
Ø 80 (3.15)
Ø 113.5 (4.47)
Ø 80 (3.15)
Ø 69.3 (2.73)
64 (2.52)
80 (3.15) 12 (0.47)
128.7 (5.07)
17.5 (0.69)
128.6 (5.06)
73 (2.87)
Ø 80 (3.15)
Ø 94.9 (3.74) Ø 80 (3.15)
Ø 92 (3.62)
ISO 63
CFF 2.75 CFF 4.5
KF 40
Ø 55 (2.17)
60.5 (2.38) 58.5 (2.13)
84 (3.31)
37.5 (1.48)
32 (1.26)
147.5 (5.81)
25 (0.98)
Ø 91.5 (3.60)
A
145.8 (5.74)
17.3 (0.68)
VIEW FROM A
Dimensions: millimeters (inches)
Outline Drawings
Technical Specifications
Pumping speed (l/s)
With CF 4
1
⁄
2
” or ISO 63: N
2
: 77 l/s He: 65 l/s H
2
: 50 l/s
With CF 2
3
⁄
4
” or KF 40: N
2
: 50 l/s He: 56 l/s H
2
: 46 l/s
Compression ratio N
2
: >7 x 10
6
He: 3 x 10
3
H
2
: 3 x 10
2
Base pressure* (with recommended forepump) 5 x 10
-9
mbar (3.8 x 10
-9
Torr)
Inlet flange CF 4
1
⁄
2
” O.D. ISO 63
CF 2
3
⁄
4
” O.D. KF 40
Foreline flange KF 16 NW
Rotational speed 1350 Hz (max)
Start-up time < 60 seconds
Recommended forepump Mechanical: Varian DS 42 – DS 102
Dry pump: Varian SH 100
Operating position Any
Cooling requirements Natural air convection
Forced air or water optional
Bakeout temperature 120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
Vibration level (displacement) <0.01 µm at inlet flange
Weight kg (lbs) ISO 63: 1,82 (4)
CF 4
1
⁄
2
”: 2,68 (5.90)
* According to standard DIN 28 428.