Specifications

166
Turbo-V 301 Navigator
A
Ø 1 15.1 (4.5)
Ø144.0 (5.7)
174.0 (6.9)
64.0 (2.5)
238.0 (9.4)
Ø151.6 (6.0) Ø130.0 (5.1)
44.7 (1.8)
174.0 (6.9)
238.0 (9.4)
Ø 202.4 (8.0)
Ø 120.0 (4.7)
Ø 180.0 (7.1)
241.0 (9.5)
21.6 (0.9)
177.0 (7.0)
ISO 160
CFF 8’’
21.6 (0.9)
Ø115.1 (4.5)
24V CONTROLLER FRONT PANEL
120/220V CONTROLLER FRONT PANEL
ISO 100
CFF 6’’
47.2 (1.9)
47.0 (1.9)
84.6 (3.3)
106.9 (4.2)
106.9 (4.2)
VIEW FROM “A”
WATER COOLING
1/8 GAS
85.1 (3.4)
86.4 (3.4)
1
1
5
.3
(4
.5
)
63’0’
20’0’
Ø116.1 (4.6)
WATER COOLING
1/8 GAS
Outline Drawings
Dimensions: millimeters (inches)
Technical Specifications
Pumping speed
With CF 8” or ISO 160: N
2
: 280 l/s He: 230 l/s H
2
: 210 l/s
With CF 6” or ISO 100: N
2
: 250 l/s He: 220 l/s H
2
: 200 l/s
Compression ratio N
2
: 7 x 10
8
He: 1 x 10
5
H
2
: 1 x 10
4
Base pressure * (with recommended forepump) mechanical: < 5 x 10
-10
mbar (< 3.75 x 10
-10
Torr)
dry: < 5 x 10
-9
mbar (< 3.75 x 10
-9
Torr)
Inlet flange CF 8” O.D. ISO 160
CF 6” O.D. ISO 100
Foreline flange KF16 (KF25 optional)
Rotational speed 56,000 rpm
Start-up time < 3 minutes
Recommended forepump Mechanical: Varian DS 102
Dry scroll: Varian SH-100
Operating position Any
Cooling requirements Natural air convection
Forced air or water optional
Bakeout temperature 120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
Vibration level (displacement) <0.01 µm at inlet flange
Weight kg (lbs)
Kit: (Pump + Navigator controller) ISO 100 and 160: 4.5 (10)
CF 6” and 8”: 8 (17.6)
Navigator controller 1 (2.2)
1
⁄
4
Rack controller 4,5 (10)
* According to PNEUROP 5608.
SEM version available on request
2 Turbo-V 301 pumps are in the 500-MS