Specifications
168
Turbo-V 551 Navigator
332.8 (13.1)
ISO 160-F
Ø225.0 (8.8)
229.1 (9.0)
A
CFF 6"
Ø151.6 (6.0)
=
=
157.1 (6.2)
12°0'
VIEW FROM "A"
109.8 (4.3)166.0 (6.5)
MoniTorr
PORT
13.2 (0.5)
343.8 (13.5)
130.8 (5.1)
70.0 (2.8)
200.6 (7.9)
Ø202.4 (8.0)Ø180.0 (7.1)
ISO 160
CFF 8"
11.3 (0.4)
126.0 (5.0)
146.5 (5.8)
334.3 (13.2)
PURGE
PORT
11.6 (0.5)
325.8 (12.8)
VIEW FROM "B"
VENT
PORT
Ø114.0 (4.5)
Ø115.0 (4.5)
Ø164.0 (6.5)
203.7 (8.0)
Ø163.4 (6.4)
B
(WATER COOLING)
(WATER COOLING)
ELBOW 90°
ELECT.
CONNECTOR
FORELINE
KF 25
WATER
COOLING 1/8 G
WATER
COOLING 1/8 G
Ø203.7 (8.0)
Outline Drawings
Dimensions: millimeters (inches)
Technical Specifications
Pumping speed (with inlet screen)
CF 6”: N
2
: 350 l/s He: 450 l/s H
2
: 450 l/s
CF 8” or ISO 160: N
2
: 550 l/s He: 600 l/s H
2
: 510 l/s
Compression ratio N
2
: 1 x 10
9
He: 1 x 10
7
H
2
: 1 x 10
6
Base pressure *(with minimum recommended forepump) <1 x 10
-10
mbar (< 1 x 10
-10
Torr)
Inlet flange CF 6” ISO 160
CF 8” ISO 160-F bolted
Foreline flange KF 25
Rotational speed 42,000 rpm
Start-up time <5 minutes
Recommended forepump Mechanical: Varian DS 302
Dry scroll: Varian TS300
Operating position Any
Cooling requirements Natural air convection
Water optional (use water with electrical
conductivity ≤ 500 µS/cm)
Bakeout temperature 120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
Vibration level (displacement) <0.01 µm at inlet flange
Weight kg (lbs) ISO flange 19.4 (43.0)
CF flange 23.4 (51.6)
* According to PNEUROP 5608.
SEM version available on request