Specifications

174
Turbo-V 3K-T System
Turbo-V 3K-T Turbo-V 3K-T
182.5 (7.18)
Ø 306 (12.05)
Ø 334.9 (13.18)
CFF 12"
ISO 250F
146 (5.75)
105 (4.35)
217 (8.54)
413 (16.26)
124.2 (4.89)
262 (10.31)
30°
60°
FORELINE
VENT
BOTTOM VIEW ISO 250F AND CFF 12"
INLET SCREEN WITH CENTER-RING
VENT
385 (15.16)
16 (0.63)
4
0 (1
.5
7)
Outline Drawings
Dimensions: millimeters (inches)
Technical Specifications
Pumping speed (without inlet screen) N
2
: 2050 l/s He: 2400 l/s Ar: 1900 l/s H
2
: 2300 l/s
Compression ratio N
2
: 10
9
He: 1.2 x 10
5
Ar: >10
9
H
2
: 1.5 x 10
4
Base pressure* with recommended forepump <1 x 10
-9
mbar
Inlet flange ISO 250 F CFF 12”
Foreline flange KF 40 NW
Nominal rotational speed 31,800 rpm
Start-up time without gas load and with the recommended forepump < 9 minutes
Minimum recommended forepump 50 m
3
/h
Operating position Any
Operating ambient temperature +5 °C to +40 °C
Cooling requirements Water
Weight (ISO 250) 55 (121.25) kg (lbs)
Power Supply Input voltage 100-240 Vac
Input freq. 50-60 Hz
Communication Interface Analogue I/O Standard
RS232/RS485 Standard
Profibus Optional
* According to PNEUROP 5608.
The new Turbo-V 3K-T System
• A versatile 2000 l/s class turbo system offering the highest
performance in a unique compact design
• Innovative features like integrated electronics, real-time
thermal overload protection and intelligent MoniTorr
technology are all integrated
• Designed for demanding high gas load or light gas
pumping and high compression UHV applications
• Integrated package includes Turbo Molecular Pump, Drive
Electronics, Power Supply, MoniTorr technology and
Communication
• Versatile electronics interface with easy to use T-Plus
Software
• Analog I/O signals and RS232 / RS485 interface are standard
• Varian Profibus
®
interface optional