Specifications

Turbo
Pumps
Varian, Inc. Vacuum Technologies
Turbo-V Pumps
175
0
500
1000
1500
2000
2500
Inlet pressure (mbar)
Pumping speed (l/s)
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
110
Pumping Speed vs Inlet Pressure (*)
Compression ratio
Foreline pressure (mbar)
10
-3
0
10
2
10
4
10
6
10
8
10
10
10
-2
10
-1
110
Compression Ratio vs Foreline Pressure
Description Weight
kg (Ibs) Part Number
Pumping Systems (*)
Turbo-V 3K-T ISO 250 F system with integrated purge/vent 9698875
Turbo-V 3K-T ISO 250 F system without purge/vent 9698882
Turbo-V 3K-T ISO 250 F system with ProfiBus, with integrated purge/vent 9698877
Turbo-V 3K-T ISO 250 F system with ProfiBus without purge/vent 9698883
Turbo-V 3K-T CFF 12” system with integrated purge/vent 9698879
Turbo-V 3K-T CFF 12” system without purge/vent 9698884
Turbo-V 3K-T CFF 12” system with ProfiBus, with integrated purge/vent 9698881
Turbo-V 3K-T CFF 12” system with ProfiBus without purge/vent 9698885
(*) Pumping Systems include Pump with Integrated Electronics, Inlet Screen, Accessory Bag with Mating Connectors for Remote I/O and Serial Port
Accessories
Mains cable NEMA Plug, 3m long 0.5 (1.0) 9699958
Mains cable European Plug, 3m long 0.5 (1.0) 9699957
T-Plus Software and serial cable 0.5 (1.0) 9699883
Inlet screen ISO 250 with Viton centering ring 0.5 (1.0) 9699138
Inlet screen CFF 12. AISI 0.5 (1.0) 9699350
Water cooling kit for 6x8 (IDxOD) flexible tube 0.5 (1.0) 9699348
Water cooling kit for
3
/
8
in. ID flexible tube 0.5 (1.0) 9699338
1
/
4
Rack Remote Control Panel 1.0 (2.0) 9698850
Remote Panel Connection Cable 0.5 (1.0) 9699945
IP54 proof connectors 1.0 (2.0) 9698960
Remote Assist Support Program 12 Months – – RASS3KT_1YR
Remote Assist Support Program 24 Months – – RASS3KT_2YR
Ordering Information
Helium
Nitrogen Argon
Nitrogen
Helium Hydrogen
(*) Measured with a 60 m
3
/h forepump.