Specifications

Turbo-V 6000
176
786 (30.94)
ISO 500
ISO 500
ISO 100
60°
20°
60°
20°
M12
KF 10
Vent port
Foreline port
Ø 550 (21.65)
Ø 606.3 (23.87)
Ø 240 (9.45)
195 (7.67)
Ø 620 (24.41)
Ø 556 (21.89)
315 (12.4)
513 (20.19)
760 (29.92)
303 (11.93)
87 (3.42) 19 (0.75)
358 (14.09) 58 (2.28)
300 (11.81)
8 (0.31)
Outline Drawings
Dimensions: millimeters (inches)
Technical Specifications
Pumping speed l/s N
2
: 6,000 He: 7,000 H
2
: 6,500
Compression ratio N
2
: > 1 x 10
10
He: 2.3 x 10
5
H
2
: 8 x 10
3
Base pressure with recommended mechanical pump: < 1 x 10
-10
mbar (< 1 x 10
-10
Torr)
Inlet flange ISO 500
Foreline flange ISO 100
Rotational speed 14,000 rpm
Startup time 30 minutes
Recommended forepump 80 m
3
/h
Operating position Vertical ±10°
Cooling requirements Water
Bakeout temperature 80 °C at inlet flange (ISO version)
Vibration level (displacement) ≤ 0.05 µm at inlet flange
Weight kg (lbs) 250 (550)
Lubricant Varian T.A. oil (charge 1,000 cm
3
)