Specifications

Turbo-V Pumps
177
Varian, Inc. Vacuum Technologies
Turbo
Pumps
Inlet pressure (mbar)
3900
0
10
-10
Pumping speed (l/s)
10
-5
10
-4
10
-3
10
-2
10
-1
10
5200
2600
1300
1
6500
7800
Pumping Speed vs Inlet Pressure (DN 500 only)
1
10
-3
10
-2
10
-1
1
Foreline pressure (mbar)
Compression ratio
10
-4
10
2
10
4
10
6
10
8
10
10
Compression Ratio vs Foreline Pressure
Description Weight kg (Ibs) Part Number
Pump
Turbo-V 6000 pump with ISO 500 inlet flange 282.0 (620.0) On request
Controllers
Turbo-V 6000 controller, 120 V 50.0 (110.0) On request
Turbo-V 6000 controller, 220 V 50.0 (110.0) On request
Accessories
Inlet screen, DN 500 10.0 (22.0) On request
Vent valve with fixed delay time 2.0 (4.0) On request
Vent device with adjustable delay time 2.2 (5.0) On request
Replacement Parts
Varian T.A. oil, 100 cm
3
0.5 (1.0) On request
Varian T.A. oil, 1000 cm
3
1.4 (3.0) On request
Please contact Varian for ordering information.
Ordering Information
Nitrogen
Helium Hydrogen
Nitrogen
Helium Hydrogen