Specifications

178
Turbo-V 2K-G System
Outline Drawings
Technical Specifications
Pumping speed N
2
: 1600 l/s
Compression ratio N
2
: 3 x 10
5
Base pressure* with recommended forepump < 1 x 10
-8
mbar
Inlet flange ISO 250 F
Foreline flange KF 40 NW
Nominal rotational speed 33,000 rpm
Start-up time <7 minutes
Recommended forepump > 40 m
3
/h
Operating position Any
Operating ambient temperature +5 °C to +40 °C
Power supply Input voltage 100 - 240 Vac
Input freq. 50 – 60 Hz
Communication Interface Analogue I/O Standard
RS232 / RS485 Standard
Profibus Optional
Dimensions Height 335 mm
Diameter 335 mm
Weight 35 kg
* According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out,
with a Turbopump fitted with a ISO 250 flange and using the recommended pre-vacuum pump
188,2 (7.34)
INLET SCREEN WITH CENTER-RING
FLANGE ISO 250F
EYEBOLT
PURGE & VENT
SWAGELOCK PIPE 1/8
CONTROLLER
FRONT PANEL
Ø 310 (12.09)
Ø 335 (13.07)
Ø 11 (0.43) N° 12
FORELINE KF 40
WATER COOLING FOR
RUBBER TUBE DIA 9.0
40 (1.56)
30
°
45°
298 (11.62)
261 (10.3)
95 (3.71)
124,1 (4.84)
146 (5.69)
245 (9.56)
335 (13.07)
The System Interface
• Integrated package includes Turbo Molecular Pump, Drive
Electronics, Power Supply, MoniTorr, Purge Gas and
Communication
• Versatile electronics interface with easy to use control Software
• Analog I/O signals and RS232 / RS485 interface as standard
• Varian Profibus® interface as option
Turbo-V 2K-G System
• The first application-specific pumping solution designed for thin
film deposition equipment
• The highest performing, most compact unit available
• The first fully integrated approach for maximum system
productivity and uptime
Dimensions: millimeters (inches)