Specifications

Turbo
Pumps
Varian, Inc. Vacuum Technologies
Turbo-V Pumps
179
Description Part Number
Turbo-V 2K-G system with MoniTorr 9698871
Turbo-V 2K-G system with Profibus and MoniTorr 9698873
Mains cable NEMA Plug, 3m long 9699958
Mains cable European Plug, 3m long 9699957
Serial cable and Navigator Software 3.0 9699883
MoniTorr connectivity kit 9699260
Remote Assist Support program 12 Months RASS2KG_1YR
Remote Assist Support program 24 Months RASS2KG_2YR
Inlet screen ISO 250 with center ring 9699138
Water cooling kit for 6x8 (IDxOD) flexible tube 9699348
Water cooling kit for 3/8 in. ID flexible tube 9699338
Ordering Information
Inlet pressure (mbar)
0
10
-6
Pumping speed (l/s)
200
10
-5
10
-4
10
-3
10
-2
10
-1
1
600
1000
1400
1600
400
800
1200
1800
Pumping Speed vs Inlet Pressure
Outlet pressure (mbar)
1
10
-3
Compression ratio
10
10
-2
10
-1
110
100
1000
100000
10000
1000000
Compression Ratio vs Foreline Pressure
Nitrogen Argon Nitrogen Argon