Specifications

Turbo
Pumps
Turbo-V Pumps
187
Handheld Terminal
The handheld terminal is a remote control display for use
with V 81 series Turbo-V pumps when connected to a
controller without a front panel. It consists of an LCD
alphanumeric display and keyboard which provide useful real
time indications of the operating conditions and parameters
of the turbopump.
Moreover, it allows the reprogramming of the controller
parameters and troubleshooting of the pump and controller.
The handheld terminal is connected to and powered from the
Turbo-V controller through a 1.5 meter cable.
For ordering information, please call your local Varian Office.
Purge Valve
To protect the bearings of a turbomolecular pump used with
aggressive process gases, a measured supply of inert gas
(N
2
, Ar) must flow into the pump body around the upper
bearing toward the fore-vacuum line. The Varian fixed orifice
purge valve is calibrated for nitrogen to provide the correct
gas flow to safely operate Turbo-V pumps. See Fixed Orifice
Purge Valve Selection Guide below.
Pump model N
2
Gas Line Weight Part
Flowrate Connection kg (Ibs) Number
V301/V551/V701/1001 Navigator, and 3K-T models without integrated purge/vent
10 SCCM NW16KF 0.2 (0.5) 9699239
10 SCCM
1
⁄
4
Swagelok 0.2 (0.5) 9699240
20 SCCM NW16KF 0.2 (0.5) 9699241
20 SCCM
1
⁄
4
Swagelok 0.2 (0.5) 9699242
10 SCCM
1
⁄
4
Swagelok –
1
⁄
4
Swagelok* 0.2 (0.5) 9699232
20 SCCM
1
⁄
4
Swagelok –
1
⁄
4
Swagelok* 0.2 (0.5) 9699236
* For remote installation
Ordering Information
Fixed Orifice Purge Valve Selection Guide
Varian, Inc. Vacuum Technologies