Specifications

Turbo-V Pump Typical Applications
156
Semiconductors
The turbo pump is the critical element in the creation of an
appropriate environment in the world of semiconductor
manufacturing. In fact, as semiconductor chip geometries
continue to shrink, the reliance on turbo pump technology
is the highest it has been in the history of semiconductor
manufacturing. Varian’s turbo pumps provide unique and
critical advantages in the creation of vacuum for the
manufacture of semiconductor devices. Varian’s rich history
of innovations includes the pioneering of thermally stable
ceramic bearings in place of stainless steel bearings, and the
development of MacroTorr® turbo stages, among others.
The use of ceramic bearing technology allows Varian to run
its turbo pumps at the one of the highest rotational speeds
in the industry, providing high pumping speed for light
gases like helium and hydrogen, which are frequently
liberated in the production of semiconductors. Since
pumping speed is directly related to rotational speed, our
turbo pumps provide improved pumping speed in a more
compact package.
Another critical innovation by Varian in the world of
turbo pumps has been the introduction of the monolithic
rotor in conjunction with MacroTorr® turbo stages.
These two additions provide the turbo pump with the
ability to meet demanding rapid cycle applications, such as
vacuum load locks, in which high gas-load cycling and
high tolerable foreline pressures are critical to the success
of the process. Varian’s turbo pump capabilities are unique,
and the most advanced in the industry, allowing the
user to share a single roughing pump across multiple
turbo pumps, thus reducing costs and improving tool
reliability by reducing the number of dynamic systems
within the process tool.