Specifications

system design in the most stringent space requirements.
MacroTorr® Turbo Pumps can operate at higher foreline
pressures, allowing the use of diaphragm roughing pumps,
thus providing a completely clean, oil-free compact and cost
effective pumping package.
Whenever a large amount of gas has to be pumped and higher
throughput is needed, the combination of Turbo-V pumps
and TriScroll® dry pumps is the state-of-the-art solution.
All the Turbo-V Navigator pumps have the option of an on
board controller, allowing easy plug and pump operation, or a
rack-mounted controller for applications where the electronics
need to be remotely placed (i.e. radioactive environments).
Analytical Instrumentation
Electron Microscopy (SEM, TEM), Focused Ion-beam
Systems (FIB) and Surface Analysis
Modern focused-beam systems such as SEM’s, TEM’s
and FIB’s utilize columns that project electrons or ions onto
microscopic samples for detailed analysis. End users analyze
all types of substances from organic compounds to
semiconductor wafers. In the Semiconductor industry, in
particular, they require more sensitivity for better
sample resolution. Another key requirement is high sample
throughput in order to lower the cost of ownership
of these instruments.
Based on these requirements, the demand for high
performance vacuum pumps is greater than ever. Varian
offers a full range of high and ultra-high vacuum pumps
designed especially for the demanding requirements of SEM’s,
TEM’s and surface analysis systems (Varian has a full range of
ion pumps, which are key products for this application; please
see ion pump section).
Turbo molecular pumps are also a key component in modern
focused-beam systems because they offer fast, oil-free air
evacuation of large sample chambers (oil-free operation is a
key requirement of many modern analysis applications such
as semiconductor manufacturing). From Varian’s full range of
turbo pumps, the focused-beam system designer can choose
a pump size that offers the best chamber evacuation time
with the best cost of ownership and compact size for use in
limited space situations. Varian has a full line of customized,
low vibration turbo pumps for the most sensitive microscopy
applications. Finally, Varian has a full range of integrated
pump controllers that offer the highest control flexibility with
near zero electromagnetic noise generation.
Varian offers a full range of application
specific designed SEM turbo pumps
including 300 l/s, 550 l/s, 700 l/s and
1000 l/s speeds. All of Varian’s SEM turbo
pumps designs can be verified in Varian’s
application lab. Finally, each SEM turbo
pump is tested in production before being
shipped to the customer.
Turbo-V Pumps
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Varian, Inc. Vacuum Technologies
Turbo
Pumps
High Energy Physics and Research Laboratories
Turbomolecular pumps are widely used in High Energy
Physics, Fusion Technology and general UHV research.
Synchrotron Light Sources, Particle Accelerator Rings, UHV
Laboratory research, and Fusion reactors need extremely
clean, reliable and cost effective HV and UHV .
Maintenance-free pumps are specifically required, because
most pumps are not easily accessible.
Varian Turbo-V pumps are designed to offer unmatched
reliability, performance and cleanliness for these applications.
Ceramic bearing pumps, thanks to their reduced rolling
friction, low stress and high thermal stability compared to
conventional bearings, deliver longer operating life.
Ultra low vapor pressure solid lubricant eliminates the need
for maintenance and assures clean operation under any
operating conditions.
Furthermore, in contrast to most of the other pumps, all
Varian Turbo-V pumps have both the upper and the lower
bearing in the rough vacuum side and not exposed to UHV,
further reducing the possibility of contamination - even in
case of misuse.
The patented MacroTorr® stages provide the highest speed
and compression ratio in the smallest footprint; furthermore
all the Turbo-V pumps can truly be mounted in any
orientation, from vertical to horizontal to upside down, aiding